7/4/2010	12:12:29 AM	H2 valve closed
7/4/2010	12:12:29 AM	BCl3 valve closed
7/4/2010	12:12:29 AM	PH3 valve closed
7/4/2010	12:12:29 AM	SiCl4 pre valve closed
7/4/2010	12:12:29 AM	SiCl4 post valve closed
7/4/2010	12:12:29 AM	Main Vac valve closed
7/4/2010	12:12:29 AM	Bypass valve closed
7/4/2010	12:12:29 AM	Helium valve opened
7/4/2010	12:12:29 AM	Bubbler valve opened
7/4/2010	12:12:29 AM	Helium MFC set to  500.000000
7/4/2010	12:12:29 AM	H2 MFC set to  0.000000
7/4/2010	12:12:29 AM	BCl3 MFC set to  0.000000
7/4/2010	12:12:29 AM	PHl3 MFC set to  0.000000
7/4/2010	12:12:29 AM	SiCl4 MFC set to  0.000000
7/4/2010	12:12:29 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:12:29 AM	Tube furnace set to 0
7/4/2010	12:32:29 AM	Helium valve closed
7/4/2010	12:32:29 AM	H2 valve closed
7/4/2010	12:32:29 AM	BCl3 valve closed
7/4/2010	12:32:29 AM	PH3 valve closed
7/4/2010	12:32:29 AM	SiCl4 pre valve closed
7/4/2010	12:32:29 AM	SiCl4 post valve closed
7/4/2010	12:32:29 AM	Main Vac valve closed
7/4/2010	12:32:29 AM	Bypass valve closed
7/4/2010	12:32:29 AM	Bubbler valve closed
7/4/2010	12:32:29 AM	Helium MFC set to  0.000000
7/4/2010	12:32:29 AM	H2 MFC set to  0.000000
7/4/2010	12:32:29 AM	BCl3 MFC set to  0.000000
7/4/2010	12:32:29 AM	PHl3 MFC set to  0.000000
7/4/2010	12:32:29 AM	SiCl4 MFC set to  0.000000
7/4/2010	12:32:29 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:32:29 AM	Tube furnace set to 0
7/4/2010	12:32:29 AM	Run finished at 12:32 AM
7/4/2010	12:49:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2010	12:49:59 AM	Recipe started at 12:49 AM
7/4/2010	12:49:59 AM	Helium valve closed
7/4/2010	12:49:59 AM	H2 valve closed
7/4/2010	12:49:59 AM	BCl3 valve closed
7/4/2010	12:49:59 AM	PH3 valve closed
7/4/2010	12:49:59 AM	SiCl4 pre valve closed
7/4/2010	12:49:59 AM	SiCl4 post valve closed
7/4/2010	12:49:59 AM	Main Vac valve closed
7/4/2010	12:49:59 AM	Bubbler valve closed
7/4/2010	12:49:59 AM	Bypass valve opened
7/4/2010	12:49:59 AM	Helium MFC set to  0.000000
7/4/2010	12:49:59 AM	H2 MFC set to  0.000000
7/4/2010	12:49:59 AM	BCl3 MFC set to  0.000000
7/4/2010	12:49:59 AM	PHl3 MFC set to  0.000000
7/4/2010	12:49:59 AM	SiCl4 MFC set to  0.000000
7/4/2010	12:49:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:50:00 AM	Tube furnace set to 0
7/4/2010	12:50:47 AM	Helium valve closed
7/4/2010	12:50:47 AM	H2 valve closed
7/4/2010	12:50:47 AM	BCl3 valve closed
7/4/2010	12:50:47 AM	PH3 valve closed
7/4/2010	12:50:47 AM	SiCl4 pre valve closed
7/4/2010	12:50:47 AM	SiCl4 post valve closed
7/4/2010	12:50:47 AM	Bubbler valve closed
7/4/2010	12:50:47 AM	Main Vac valve opened
7/4/2010	12:50:47 AM	Bypass valve opened
7/4/2010	12:50:47 AM	Helium MFC set to  0.000000
7/4/2010	12:50:47 AM	H2 MFC set to  0.000000
7/4/2010	12:50:47 AM	BCl3 MFC set to  0.000000
7/4/2010	12:50:47 AM	PHl3 MFC set to  0.000000
7/4/2010	12:50:47 AM	SiCl4 MFC set to  0.000000
7/4/2010	12:50:47 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:50:47 AM	Tube furnace set to 0
7/4/2010	12:50:47 AM	Run finished at 12:50 AM
7/4/2010	12:50:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2010	12:50:54 AM	Helium MFC set to  100.000000
7/4/2010	12:50:55 AM	Helium valve opened
7/4/2010	12:52:30 AM	Helium valve closed
7/4/2010	12:53:09 AM	Helium valve opened
7/4/2010	1:18:51 AM	Helium valve closed
7/4/2010	1:18:53 AM	Helium MFC set to  0.000000
7/4/2010	11:20:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:20:27 AM	Recipe started at 11:20 AM
7/4/2010	11:20:27 AM	H2 valve closed
7/4/2010	11:20:27 AM	BCl3 valve closed
7/4/2010	11:20:27 AM	PH3 valve closed
7/4/2010	11:20:27 AM	SiCl4 pre valve closed
7/4/2010	11:20:27 AM	SiCl4 post valve closed
7/4/2010	11:20:27 AM	Main Vac valve closed
7/4/2010	11:20:27 AM	Bypass valve closed
7/4/2010	11:20:27 AM	Bubbler valve closed
7/4/2010	11:20:27 AM	Helium valve opened
7/4/2010	11:20:27 AM	Helium MFC set to  500.000000
7/4/2010	11:20:27 AM	H2 MFC set to  0.000000
7/4/2010	11:20:27 AM	BCl3 MFC set to  0.000000
7/4/2010	11:20:27 AM	PHl3 MFC set to  0.000000
7/4/2010	11:20:27 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:20:27 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:20:27 AM	Tube furnace set to 0
7/4/2010	11:21:47 AM	Helium valve closed
7/4/2010	11:21:47 AM	H2 valve closed
7/4/2010	11:21:47 AM	BCl3 valve closed
7/4/2010	11:21:47 AM	PH3 valve closed
7/4/2010	11:21:47 AM	SiCl4 pre valve closed
7/4/2010	11:21:47 AM	SiCl4 post valve closed
7/4/2010	11:21:47 AM	Main Vac valve closed
7/4/2010	11:21:47 AM	Bypass valve closed
7/4/2010	11:21:47 AM	Bubbler valve closed
7/4/2010	11:21:47 AM	Helium MFC set to  0.000000
7/4/2010	11:21:47 AM	H2 MFC set to  0.000000
7/4/2010	11:21:47 AM	BCl3 MFC set to  0.000000
7/4/2010	11:21:47 AM	PHl3 MFC set to  0.000000
7/4/2010	11:21:47 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:21:47 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:21:47 AM	Tube furnace set to 0
7/4/2010	11:21:48 AM	Run finished at 11:21 AM
7/4/2010	11:21:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:23:53 AM	Helium valve opened
7/4/2010	11:23:58 AM	Helium MFC set to  500.000000
7/4/2010	11:24:13 AM	Helium valve closed
7/4/2010	11:24:16 AM	Helium MFC set to  0.000000
7/4/2010	11:24:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:24:23 AM	Recipe started at 11:24 AM
7/4/2010	11:24:23 AM	H2 valve closed
7/4/2010	11:24:23 AM	BCl3 valve closed
7/4/2010	11:24:23 AM	PH3 valve closed
7/4/2010	11:24:23 AM	SiCl4 pre valve closed
7/4/2010	11:24:23 AM	SiCl4 post valve closed
7/4/2010	11:24:23 AM	Main Vac valve closed
7/4/2010	11:24:23 AM	Bypass valve closed
7/4/2010	11:24:23 AM	Bubbler valve closed
7/4/2010	11:24:23 AM	Helium valve opened
7/4/2010	11:24:23 AM	Helium MFC set to  500.000000
7/4/2010	11:24:23 AM	H2 MFC set to  0.000000
7/4/2010	11:24:23 AM	BCl3 MFC set to  0.000000
7/4/2010	11:24:23 AM	PHl3 MFC set to  0.000000
7/4/2010	11:24:23 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:24:23 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:24:23 AM	Tube furnace set to 0
7/4/2010	11:24:23 AM	Helium valve closed
7/4/2010	11:24:24 AM	H2 valve closed
7/4/2010	11:24:24 AM	BCl3 valve closed
7/4/2010	11:24:24 AM	PH3 valve closed
7/4/2010	11:24:24 AM	SiCl4 pre valve closed
7/4/2010	11:24:24 AM	SiCl4 post valve closed
7/4/2010	11:24:24 AM	Main Vac valve closed
7/4/2010	11:24:24 AM	Bypass valve closed
7/4/2010	11:24:24 AM	Bubbler valve closed
7/4/2010	11:24:24 AM	Helium MFC set to  0.000000
7/4/2010	11:24:24 AM	H2 MFC set to  0.000000
7/4/2010	11:24:24 AM	BCl3 MFC set to  0.000000
7/4/2010	11:24:24 AM	PHl3 MFC set to  0.000000
7/4/2010	11:24:24 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:24:24 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:24:24 AM	Tube furnace set to 0
7/4/2010	11:24:24 AM	Run finished at 11:24 AM
7/4/2010	11:24:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:24:31 AM	Bypass valve opened
7/4/2010	11:24:32 AM	Main Vac valve opened
7/4/2010	11:24:35 AM	Bypass valve closed
7/4/2010	11:24:35 AM	Main Vac valve closed
7/4/2010	11:24:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:24:39 AM	Recipe started at 11:24 AM
7/4/2010	11:24:39 AM	H2 valve closed
7/4/2010	11:24:39 AM	BCl3 valve closed
7/4/2010	11:24:39 AM	PH3 valve closed
7/4/2010	11:24:39 AM	SiCl4 pre valve closed
7/4/2010	11:24:39 AM	SiCl4 post valve closed
7/4/2010	11:24:39 AM	Main Vac valve closed
7/4/2010	11:24:39 AM	Bypass valve closed
7/4/2010	11:24:39 AM	Bubbler valve closed
7/4/2010	11:24:39 AM	Helium valve opened
7/4/2010	11:24:39 AM	Helium MFC set to  500.000000
7/4/2010	11:24:39 AM	H2 MFC set to  0.000000
7/4/2010	11:24:39 AM	BCl3 MFC set to  0.000000
7/4/2010	11:24:39 AM	PHl3 MFC set to  0.000000
7/4/2010	11:24:39 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:24:39 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:24:39 AM	Tube furnace set to 0
7/4/2010	11:25:59 AM	Helium valve closed
7/4/2010	11:25:59 AM	H2 valve closed
7/4/2010	11:25:59 AM	BCl3 valve closed
7/4/2010	11:25:59 AM	PH3 valve closed
7/4/2010	11:25:59 AM	SiCl4 pre valve closed
7/4/2010	11:25:59 AM	SiCl4 post valve closed
7/4/2010	11:25:59 AM	Main Vac valve closed
7/4/2010	11:25:59 AM	Bypass valve closed
7/4/2010	11:25:59 AM	Bubbler valve closed
7/4/2010	11:25:59 AM	Helium MFC set to  0.000000
7/4/2010	11:25:59 AM	H2 MFC set to  0.000000
7/4/2010	11:25:59 AM	BCl3 MFC set to  0.000000
7/4/2010	11:25:59 AM	PHl3 MFC set to  0.000000
7/4/2010	11:25:59 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:25:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:25:59 AM	Tube furnace set to 0
7/4/2010	11:25:59 AM	Run finished at 11:25 AM
7/4/2010	11:25:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:36:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2010	11:36:03 AM	Recipe started at 11:36 AM
7/4/2010	11:36:03 AM	Helium valve closed
7/4/2010	11:36:03 AM	H2 valve closed
7/4/2010	11:36:03 AM	BCl3 valve closed
7/4/2010	11:36:03 AM	PH3 valve closed
7/4/2010	11:36:03 AM	SiCl4 pre valve closed
7/4/2010	11:36:03 AM	SiCl4 post valve closed
7/4/2010	11:36:03 AM	Main Vac valve closed
7/4/2010	11:36:03 AM	Bubbler valve closed
7/4/2010	11:36:03 AM	Bypass valve opened
7/4/2010	11:36:03 AM	Helium MFC set to  0.000000
7/4/2010	11:36:03 AM	H2 MFC set to  0.000000
7/4/2010	11:36:03 AM	BCl3 MFC set to  0.000000
7/4/2010	11:36:03 AM	PHl3 MFC set to  0.000000
7/4/2010	11:36:03 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:36:03 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:36:03 AM	Tube furnace set to 0
7/4/2010	11:36:12 AM	Run aborted at 11:36 AM
7/4/2010	11:36:12 AM	Helium valve closed
7/4/2010	11:36:12 AM	H2 valve closed
7/4/2010	11:36:12 AM	BCl3 valve closed
7/4/2010	11:36:12 AM	PH3 valve closed
7/4/2010	11:36:12 AM	SiCl4 pre valve closed
7/4/2010	11:36:12 AM	SiCl4 post valve closed
7/4/2010	11:36:12 AM	Bypass valve closed
7/4/2010	11:36:12 AM	Main Vac valve closed
7/4/2010	11:36:12 AM	Bubbler valve closed
7/4/2010	11:36:12 AM	Helium MFC set to  0.000000
7/4/2010	11:36:12 AM	H2 MFC set to  0.000000
7/4/2010	11:36:12 AM	BCl3 MFC set to  0.000000
7/4/2010	11:36:12 AM	PHl3 MFC set to  0.000000
7/4/2010	11:36:12 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:36:12 AM	Tube furnace set to 0
7/4/2010	11:36:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/4/2010	11:36:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:36:18 AM	Recipe started at 11:36 AM
7/4/2010	11:36:18 AM	H2 valve closed
7/4/2010	11:36:18 AM	BCl3 valve closed
7/4/2010	11:36:18 AM	PH3 valve closed
7/4/2010	11:36:18 AM	SiCl4 pre valve closed
7/4/2010	11:36:18 AM	SiCl4 post valve closed
7/4/2010	11:36:18 AM	Main Vac valve closed
7/4/2010	11:36:18 AM	Bypass valve closed
7/4/2010	11:36:18 AM	Bubbler valve closed
7/4/2010	11:36:18 AM	Helium valve opened
7/4/2010	11:36:18 AM	Helium MFC set to  500.000000
7/4/2010	11:36:18 AM	H2 MFC set to  0.000000
7/4/2010	11:36:18 AM	BCl3 MFC set to  0.000000
7/4/2010	11:36:18 AM	PHl3 MFC set to  0.000000
7/4/2010	11:36:18 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:36:18 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:36:18 AM	Tube furnace set to 0
7/4/2010	11:36:59 AM	Helium valve closed
7/4/2010	11:36:59 AM	H2 valve closed
7/4/2010	11:36:59 AM	BCl3 valve closed
7/4/2010	11:36:59 AM	PH3 valve closed
7/4/2010	11:36:59 AM	SiCl4 pre valve closed
7/4/2010	11:36:59 AM	SiCl4 post valve closed
7/4/2010	11:36:59 AM	Main Vac valve closed
7/4/2010	11:36:59 AM	Bypass valve closed
7/4/2010	11:36:59 AM	Bubbler valve closed
7/4/2010	11:36:59 AM	Helium MFC set to  0.000000
7/4/2010	11:36:59 AM	H2 MFC set to  0.000000
7/4/2010	11:36:59 AM	BCl3 MFC set to  0.000000
7/4/2010	11:36:59 AM	PHl3 MFC set to  0.000000
7/4/2010	11:36:59 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:36:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:36:59 AM	Tube furnace set to 0
7/4/2010	11:37:00 AM	Run finished at 11:37 AM
7/4/2010	11:37:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:37:01 AM	Bypass valve opened
7/4/2010	11:37:02 AM	Main Vac valve opened
7/4/2010	11:37:07 AM	Helium MFC set to  500.000000
7/4/2010	11:37:09 AM	Helium valve opened
7/4/2010	11:38:01 AM	Helium MFC set to  500.000000
7/4/2010	11:38:56 AM	Bypass valve closed
7/4/2010	11:39:02 AM	Bypass valve opened
7/4/2010	11:39:03 AM	Main Vac valve closed
7/4/2010	11:39:23 AM	Helium valve closed
7/4/2010	11:39:26 AM	Main Vac valve opened
7/4/2010	11:39:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:39:29 AM	Recipe started at 11:39 AM
7/4/2010	11:39:29 AM	H2 valve closed
7/4/2010	11:39:29 AM	BCl3 valve closed
7/4/2010	11:39:29 AM	PH3 valve closed
7/4/2010	11:39:29 AM	SiCl4 pre valve closed
7/4/2010	11:39:29 AM	SiCl4 post valve closed
7/4/2010	11:39:29 AM	Main Vac valve closed
7/4/2010	11:39:29 AM	Bypass valve closed
7/4/2010	11:39:29 AM	Bubbler valve closed
7/4/2010	11:39:29 AM	Helium valve opened
7/4/2010	11:39:29 AM	Helium MFC set to  500.000000
7/4/2010	11:39:29 AM	H2 MFC set to  0.000000
7/4/2010	11:39:29 AM	BCl3 MFC set to  0.000000
7/4/2010	11:39:29 AM	PHl3 MFC set to  0.000000
7/4/2010	11:39:29 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:39:29 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:39:29 AM	Tube furnace set to 0
7/4/2010	11:40:49 AM	Helium valve closed
7/4/2010	11:40:49 AM	H2 valve closed
7/4/2010	11:40:49 AM	BCl3 valve closed
7/4/2010	11:40:49 AM	PH3 valve closed
7/4/2010	11:40:49 AM	SiCl4 pre valve closed
7/4/2010	11:40:49 AM	SiCl4 post valve closed
7/4/2010	11:40:49 AM	Main Vac valve closed
7/4/2010	11:40:49 AM	Bypass valve closed
7/4/2010	11:40:49 AM	Bubbler valve closed
7/4/2010	11:40:49 AM	Helium MFC set to  0.000000
7/4/2010	11:40:49 AM	H2 MFC set to  0.000000
7/4/2010	11:40:49 AM	BCl3 MFC set to  0.000000
7/4/2010	11:40:49 AM	PHl3 MFC set to  0.000000
7/4/2010	11:40:49 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:40:49 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:40:49 AM	Tube furnace set to 0
7/4/2010	11:40:49 AM	Run finished at 11:40 AM
7/4/2010	11:40:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:42:29 AM	Helium MFC set to  500.000000
7/4/2010	11:43:11 AM	Helium valve opened
7/4/2010	11:43:19 AM	Helium valve closed
7/4/2010	11:43:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:43:21 AM	Recipe started at 11:43 AM
7/4/2010	11:43:21 AM	H2 valve closed
7/4/2010	11:43:21 AM	BCl3 valve closed
7/4/2010	11:43:21 AM	PH3 valve closed
7/4/2010	11:43:21 AM	SiCl4 pre valve closed
7/4/2010	11:43:21 AM	SiCl4 post valve closed
7/4/2010	11:43:21 AM	Main Vac valve closed
7/4/2010	11:43:21 AM	Bypass valve closed
7/4/2010	11:43:21 AM	Bubbler valve closed
7/4/2010	11:43:21 AM	Helium valve opened
7/4/2010	11:43:21 AM	Helium MFC set to  500.000000
7/4/2010	11:43:21 AM	H2 MFC set to  0.000000
7/4/2010	11:43:22 AM	BCl3 MFC set to  0.000000
7/4/2010	11:43:22 AM	PHl3 MFC set to  0.000000
7/4/2010	11:43:22 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:43:22 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:43:22 AM	Tube furnace set to 0
7/4/2010	11:43:22 AM	Helium valve closed
7/4/2010	11:43:22 AM	H2 valve closed
7/4/2010	11:43:22 AM	BCl3 valve closed
7/4/2010	11:43:22 AM	PH3 valve closed
7/4/2010	11:43:22 AM	SiCl4 pre valve closed
7/4/2010	11:43:22 AM	SiCl4 post valve closed
7/4/2010	11:43:22 AM	Main Vac valve closed
7/4/2010	11:43:22 AM	Bypass valve closed
7/4/2010	11:43:22 AM	Bubbler valve closed
7/4/2010	11:43:22 AM	Helium MFC set to  0.000000
7/4/2010	11:43:22 AM	H2 MFC set to  0.000000
7/4/2010	11:43:22 AM	BCl3 MFC set to  0.000000
7/4/2010	11:43:22 AM	PHl3 MFC set to  0.000000
7/4/2010	11:43:22 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:43:22 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:43:22 AM	Tube furnace set to 0
7/4/2010	11:43:22 AM	Run finished at 11:43 AM
7/4/2010	11:43:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:43:29 AM	Bypass valve opened
7/4/2010	11:43:30 AM	Bypass valve closed
7/4/2010	11:43:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:43:32 AM	Recipe started at 11:43 AM
7/4/2010	11:43:32 AM	H2 valve closed
7/4/2010	11:43:32 AM	BCl3 valve closed
7/4/2010	11:43:32 AM	PH3 valve closed
7/4/2010	11:43:32 AM	SiCl4 pre valve closed
7/4/2010	11:43:32 AM	SiCl4 post valve closed
7/4/2010	11:43:32 AM	Main Vac valve closed
7/4/2010	11:43:32 AM	Bypass valve closed
7/4/2010	11:43:32 AM	Bubbler valve closed
7/4/2010	11:43:32 AM	Helium valve opened
7/4/2010	11:43:32 AM	Helium MFC set to  500.000000
7/4/2010	11:43:32 AM	H2 MFC set to  0.000000
7/4/2010	11:43:32 AM	BCl3 MFC set to  0.000000
7/4/2010	11:43:32 AM	PHl3 MFC set to  0.000000
7/4/2010	11:43:32 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:43:32 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:43:33 AM	Tube furnace set to 0
7/4/2010	11:43:42 AM	Helium valve closed
7/4/2010	11:43:42 AM	H2 valve closed
7/4/2010	11:43:42 AM	BCl3 valve closed
7/4/2010	11:43:42 AM	PH3 valve closed
7/4/2010	11:43:42 AM	SiCl4 pre valve closed
7/4/2010	11:43:42 AM	SiCl4 post valve closed
7/4/2010	11:43:42 AM	Main Vac valve closed
7/4/2010	11:43:42 AM	Bypass valve closed
7/4/2010	11:43:42 AM	Bubbler valve closed
7/4/2010	11:43:42 AM	Helium MFC set to  0.000000
7/4/2010	11:43:42 AM	H2 MFC set to  0.000000
7/4/2010	11:43:42 AM	BCl3 MFC set to  0.000000
7/4/2010	11:43:42 AM	PHl3 MFC set to  0.000000
7/4/2010	11:43:42 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:43:42 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:43:42 AM	Tube furnace set to 0
7/4/2010	11:43:43 AM	Run finished at 11:43 AM
7/4/2010	11:43:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/4/2010	11:45:16 AM	Helium valve opened
7/4/2010	11:45:17 AM	Helium valve closed
7/4/2010	11:45:20 AM	Helium MFC set to  500.000000
7/4/2010	11:45:22 AM	Helium valve opened
7/4/2010	11:45:26 AM	Helium valve closed
7/4/2010	11:45:27 AM	Bubbler valve opened
7/4/2010	11:45:34 AM	Helium valve opened
7/4/2010	11:45:44 AM	Helium valve closed
7/4/2010	11:45:48 AM	Helium MFC set to  0.000000
7/4/2010	11:45:49 AM	Bubbler valve closed
7/4/2010	11:45:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	11:45:59 AM	Recipe started at 11:45 AM
7/4/2010	11:45:59 AM	H2 valve closed
7/4/2010	11:45:59 AM	BCl3 valve closed
7/4/2010	11:45:59 AM	PH3 valve closed
7/4/2010	11:45:59 AM	SiCl4 pre valve closed
7/4/2010	11:45:59 AM	SiCl4 post valve closed
7/4/2010	11:45:59 AM	Main Vac valve closed
7/4/2010	11:45:59 AM	Bypass valve closed
7/4/2010	11:45:59 AM	Bubbler valve closed
7/4/2010	11:45:59 AM	Helium valve opened
7/4/2010	11:45:59 AM	Helium MFC set to  500.000000
7/4/2010	11:45:59 AM	H2 MFC set to  0.000000
7/4/2010	11:45:59 AM	BCl3 MFC set to  0.000000
7/4/2010	11:45:59 AM	PHl3 MFC set to  0.000000
7/4/2010	11:45:59 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:45:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:45:59 AM	Tube furnace set to 0
7/4/2010	11:45:59 AM	Helium valve closed
7/4/2010	11:45:59 AM	H2 valve closed
7/4/2010	11:45:59 AM	BCl3 valve closed
7/4/2010	11:45:59 AM	PH3 valve closed
7/4/2010	11:45:59 AM	SiCl4 pre valve closed
7/4/2010	11:45:59 AM	SiCl4 post valve closed
7/4/2010	11:45:59 AM	Main Vac valve closed
7/4/2010	11:45:59 AM	Bypass valve closed
7/4/2010	11:45:59 AM	Bubbler valve closed
7/4/2010	11:45:59 AM	Helium MFC set to  0.000000
7/4/2010	11:45:59 AM	H2 MFC set to  0.000000
7/4/2010	11:45:59 AM	BCl3 MFC set to  0.000000
7/4/2010	11:45:59 AM	PHl3 MFC set to  0.000000
7/4/2010	11:45:59 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:45:59 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:46:00 AM	Tube furnace set to 0
7/4/2010	11:46:15 AM	Helium valve closed
7/4/2010	11:46:15 AM	H2 valve closed
7/4/2010	11:46:15 AM	BCl3 valve closed
7/4/2010	11:46:15 AM	PH3 valve closed
7/4/2010	11:46:15 AM	SiCl4 pre valve closed
7/4/2010	11:46:15 AM	SiCl4 post valve closed
7/4/2010	11:46:15 AM	Main Vac valve closed
7/4/2010	11:46:15 AM	Bubbler valve closed
7/4/2010	11:46:15 AM	Bypass valve opened
7/4/2010	11:46:15 AM	Helium MFC set to  0.000000
7/4/2010	11:46:15 AM	H2 MFC set to  0.000000
7/4/2010	11:46:15 AM	BCl3 MFC set to  0.000000
7/4/2010	11:46:15 AM	PHl3 MFC set to  0.000000
7/4/2010	11:46:15 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:46:15 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:46:15 AM	Tube furnace set to 0
7/4/2010	11:46:49 AM	Helium valve closed
7/4/2010	11:46:49 AM	H2 valve closed
7/4/2010	11:46:49 AM	BCl3 valve closed
7/4/2010	11:46:49 AM	PH3 valve closed
7/4/2010	11:46:49 AM	SiCl4 pre valve closed
7/4/2010	11:46:49 AM	SiCl4 post valve closed
7/4/2010	11:46:49 AM	Bubbler valve closed
7/4/2010	11:46:49 AM	Main Vac valve opened
7/4/2010	11:46:49 AM	Bypass valve opened
7/4/2010	11:46:49 AM	Helium MFC set to  0.000000
7/4/2010	11:46:49 AM	H2 MFC set to  0.000000
7/4/2010	11:46:49 AM	BCl3 MFC set to  0.000000
7/4/2010	11:46:49 AM	PHl3 MFC set to  0.000000
7/4/2010	11:46:49 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:46:49 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:46:49 AM	Tube furnace set to 0
7/4/2010	11:47:39 AM	H2 valve closed
7/4/2010	11:47:39 AM	BCl3 valve closed
7/4/2010	11:47:39 AM	PH3 valve closed
7/4/2010	11:47:39 AM	SiCl4 pre valve closed
7/4/2010	11:47:39 AM	SiCl4 post valve closed
7/4/2010	11:47:39 AM	Main Vac valve closed
7/4/2010	11:47:39 AM	Bypass valve closed
7/4/2010	11:47:39 AM	Bubbler valve closed
7/4/2010	11:47:39 AM	Helium valve opened
7/4/2010	11:47:39 AM	Helium MFC set to  500.000000
7/4/2010	11:47:39 AM	H2 MFC set to  0.000000
7/4/2010	11:47:39 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:39 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:39 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:39 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:39 AM	Tube furnace set to 0
7/4/2010	11:47:42 AM	Helium valve closed
7/4/2010	11:47:42 AM	H2 valve closed
7/4/2010	11:47:42 AM	BCl3 valve closed
7/4/2010	11:47:42 AM	PH3 valve closed
7/4/2010	11:47:42 AM	SiCl4 pre valve closed
7/4/2010	11:47:42 AM	SiCl4 post valve closed
7/4/2010	11:47:42 AM	Main Vac valve closed
7/4/2010	11:47:42 AM	Bypass valve closed
7/4/2010	11:47:42 AM	Bubbler valve closed
7/4/2010	11:47:43 AM	Helium MFC set to  0.000000
7/4/2010	11:47:43 AM	H2 MFC set to  0.000000
7/4/2010	11:47:43 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:43 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:43 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:43 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:43 AM	Tube furnace set to 0
7/4/2010	11:47:45 AM	Helium valve closed
7/4/2010	11:47:45 AM	H2 valve closed
7/4/2010	11:47:45 AM	BCl3 valve closed
7/4/2010	11:47:45 AM	PH3 valve closed
7/4/2010	11:47:45 AM	SiCl4 pre valve closed
7/4/2010	11:47:45 AM	SiCl4 post valve closed
7/4/2010	11:47:45 AM	Main Vac valve closed
7/4/2010	11:47:45 AM	Bubbler valve closed
7/4/2010	11:47:45 AM	Bypass valve opened
7/4/2010	11:47:45 AM	Helium MFC set to  0.000000
7/4/2010	11:47:45 AM	H2 MFC set to  0.000000
7/4/2010	11:47:45 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:45 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:45 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:45 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:45 AM	Tube furnace set to 0
7/4/2010	11:47:45 AM	Helium valve closed
7/4/2010	11:47:45 AM	H2 valve closed
7/4/2010	11:47:45 AM	BCl3 valve closed
7/4/2010	11:47:45 AM	PH3 valve closed
7/4/2010	11:47:45 AM	SiCl4 pre valve closed
7/4/2010	11:47:45 AM	SiCl4 post valve closed
7/4/2010	11:47:45 AM	Bubbler valve closed
7/4/2010	11:47:45 AM	Main Vac valve opened
7/4/2010	11:47:45 AM	Bypass valve opened
7/4/2010	11:47:45 AM	Helium MFC set to  0.000000
7/4/2010	11:47:45 AM	H2 MFC set to  0.000000
7/4/2010	11:47:45 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:45 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:45 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:45 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:45 AM	Tube furnace set to 0
7/4/2010	11:47:48 AM	H2 valve closed
7/4/2010	11:47:48 AM	BCl3 valve closed
7/4/2010	11:47:48 AM	PH3 valve closed
7/4/2010	11:47:48 AM	SiCl4 pre valve closed
7/4/2010	11:47:48 AM	SiCl4 post valve closed
7/4/2010	11:47:48 AM	Main Vac valve closed
7/4/2010	11:47:48 AM	Bypass valve closed
7/4/2010	11:47:48 AM	Bubbler valve closed
7/4/2010	11:47:48 AM	Helium valve opened
7/4/2010	11:47:48 AM	Helium MFC set to  500.000000
7/4/2010	11:47:48 AM	H2 MFC set to  0.000000
7/4/2010	11:47:48 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:48 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:48 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:48 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:48 AM	Tube furnace set to 0
7/4/2010	11:47:51 AM	Helium valve closed
7/4/2010	11:47:51 AM	H2 valve closed
7/4/2010	11:47:51 AM	BCl3 valve closed
7/4/2010	11:47:51 AM	PH3 valve closed
7/4/2010	11:47:51 AM	SiCl4 pre valve closed
7/4/2010	11:47:51 AM	SiCl4 post valve closed
7/4/2010	11:47:51 AM	Main Vac valve closed
7/4/2010	11:47:51 AM	Bypass valve closed
7/4/2010	11:47:51 AM	Bubbler valve closed
7/4/2010	11:47:51 AM	Helium MFC set to  0.000000
7/4/2010	11:47:51 AM	H2 MFC set to  0.000000
7/4/2010	11:47:51 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:51 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:51 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:51 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:51 AM	Tube furnace set to 0
7/4/2010	11:47:52 AM	Helium valve closed
7/4/2010	11:47:52 AM	H2 valve closed
7/4/2010	11:47:52 AM	BCl3 valve closed
7/4/2010	11:47:52 AM	PH3 valve closed
7/4/2010	11:47:52 AM	SiCl4 pre valve closed
7/4/2010	11:47:52 AM	SiCl4 post valve closed
7/4/2010	11:47:52 AM	Main Vac valve closed
7/4/2010	11:47:52 AM	Bubbler valve closed
7/4/2010	11:47:52 AM	Bypass valve opened
7/4/2010	11:47:52 AM	Helium MFC set to  0.000000
7/4/2010	11:47:52 AM	H2 MFC set to  0.000000
7/4/2010	11:47:52 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:52 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:52 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:52 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:53 AM	Tube furnace set to 0
7/4/2010	11:47:53 AM	Helium valve closed
7/4/2010	11:47:53 AM	H2 valve closed
7/4/2010	11:47:53 AM	BCl3 valve closed
7/4/2010	11:47:53 AM	PH3 valve closed
7/4/2010	11:47:53 AM	SiCl4 pre valve closed
7/4/2010	11:47:53 AM	SiCl4 post valve closed
7/4/2010	11:47:53 AM	Bubbler valve closed
7/4/2010	11:47:53 AM	Main Vac valve opened
7/4/2010	11:47:53 AM	Bypass valve opened
7/4/2010	11:47:53 AM	Helium MFC set to  0.000000
7/4/2010	11:47:53 AM	H2 MFC set to  0.000000
7/4/2010	11:47:53 AM	BCl3 MFC set to  0.000000
7/4/2010	11:47:53 AM	PHl3 MFC set to  0.000000
7/4/2010	11:47:53 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:47:53 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:47:53 AM	Tube furnace set to 0
7/4/2010	11:48:02 AM	Helium valve closed
7/4/2010	11:48:02 AM	H2 valve closed
7/4/2010	11:48:02 AM	BCl3 valve closed
7/4/2010	11:48:02 AM	PH3 valve closed
7/4/2010	11:48:02 AM	SiCl4 pre valve closed
7/4/2010	11:48:02 AM	SiCl4 post valve closed
7/4/2010	11:48:02 AM	Bubbler valve closed
7/4/2010	11:48:02 AM	Main Vac valve opened
7/4/2010	11:48:02 AM	Bypass valve opened
7/4/2010	11:48:02 AM	Helium MFC set to  0.000000
7/4/2010	11:48:02 AM	H2 MFC set to  0.000000
7/4/2010	11:48:02 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:02 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:02 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:02 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:02 AM	Tube furnace set to 0
7/4/2010	11:48:03 AM	Run finished at 11:48 AM
7/4/2010	11:48:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	11:48:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	11:48:10 AM	Recipe started at 11:48 AM
7/4/2010	11:48:10 AM	Helium valve closed
7/4/2010	11:48:10 AM	H2 valve closed
7/4/2010	11:48:10 AM	BCl3 valve closed
7/4/2010	11:48:10 AM	PH3 valve closed
7/4/2010	11:48:10 AM	SiCl4 pre valve closed
7/4/2010	11:48:10 AM	SiCl4 post valve closed
7/4/2010	11:48:10 AM	Main Vac valve closed
7/4/2010	11:48:10 AM	Bubbler valve closed
7/4/2010	11:48:10 AM	Bypass valve opened
7/4/2010	11:48:10 AM	Helium MFC set to  0.000000
7/4/2010	11:48:10 AM	H2 MFC set to  0.000000
7/4/2010	11:48:10 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:10 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:10 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:10 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:10 AM	Tube furnace set to 0
7/4/2010	11:48:10 AM	Helium valve closed
7/4/2010	11:48:10 AM	H2 valve closed
7/4/2010	11:48:10 AM	BCl3 valve closed
7/4/2010	11:48:10 AM	PH3 valve closed
7/4/2010	11:48:10 AM	SiCl4 pre valve closed
7/4/2010	11:48:10 AM	SiCl4 post valve closed
7/4/2010	11:48:10 AM	Bubbler valve closed
7/4/2010	11:48:10 AM	Main Vac valve opened
7/4/2010	11:48:10 AM	Bypass valve opened
7/4/2010	11:48:10 AM	Helium MFC set to  0.000000
7/4/2010	11:48:10 AM	H2 MFC set to  0.000000
7/4/2010	11:48:10 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:10 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:10 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:10 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:10 AM	Tube furnace set to 0
7/4/2010	11:48:24 AM	H2 valve closed
7/4/2010	11:48:24 AM	BCl3 valve closed
7/4/2010	11:48:24 AM	PH3 valve closed
7/4/2010	11:48:24 AM	SiCl4 pre valve closed
7/4/2010	11:48:24 AM	SiCl4 post valve closed
7/4/2010	11:48:24 AM	Bubbler valve closed
7/4/2010	11:48:24 AM	Helium valve opened
7/4/2010	11:48:24 AM	Main Vac valve opened
7/4/2010	11:48:24 AM	Bypass valve opened
7/4/2010	11:48:24 AM	Helium MFC set to  100.000000
7/4/2010	11:48:24 AM	H2 MFC set to  0.000000
7/4/2010	11:48:24 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:24 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:24 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:24 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:25 AM	Tube furnace set to 0
7/4/2010	11:48:27 AM	Helium valve closed
7/4/2010	11:48:27 AM	H2 valve closed
7/4/2010	11:48:27 AM	BCl3 valve closed
7/4/2010	11:48:27 AM	PH3 valve closed
7/4/2010	11:48:27 AM	SiCl4 pre valve closed
7/4/2010	11:48:27 AM	SiCl4 post valve closed
7/4/2010	11:48:27 AM	Bubbler valve closed
7/4/2010	11:48:27 AM	Main Vac valve opened
7/4/2010	11:48:27 AM	Bypass valve opened
7/4/2010	11:48:27 AM	Helium MFC set to  0.000000
7/4/2010	11:48:27 AM	H2 MFC set to  0.000000
7/4/2010	11:48:27 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:27 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:27 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:27 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:28 AM	Tube furnace set to 0
7/4/2010	11:48:29 AM	H2 valve closed
7/4/2010	11:48:29 AM	BCl3 valve closed
7/4/2010	11:48:29 AM	PH3 valve closed
7/4/2010	11:48:29 AM	SiCl4 pre valve closed
7/4/2010	11:48:29 AM	SiCl4 post valve closed
7/4/2010	11:48:29 AM	Bubbler valve closed
7/4/2010	11:48:29 AM	Helium valve opened
7/4/2010	11:48:29 AM	Main Vac valve opened
7/4/2010	11:48:29 AM	Bypass valve opened
7/4/2010	11:48:29 AM	Helium MFC set to  100.000000
7/4/2010	11:48:29 AM	H2 MFC set to  0.000000
7/4/2010	11:48:29 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:29 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:29 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:29 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:29 AM	Tube furnace set to 0
7/4/2010	11:48:30 AM	Helium valve closed
7/4/2010	11:48:30 AM	H2 valve closed
7/4/2010	11:48:30 AM	BCl3 valve closed
7/4/2010	11:48:30 AM	PH3 valve closed
7/4/2010	11:48:30 AM	SiCl4 pre valve closed
7/4/2010	11:48:30 AM	SiCl4 post valve closed
7/4/2010	11:48:30 AM	Bubbler valve closed
7/4/2010	11:48:30 AM	Main Vac valve opened
7/4/2010	11:48:30 AM	Bypass valve opened
7/4/2010	11:48:30 AM	Helium MFC set to  0.000000
7/4/2010	11:48:30 AM	H2 MFC set to  0.000000
7/4/2010	11:48:30 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:30 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:30 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:30 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:30 AM	Tube furnace set to 0
7/4/2010	11:48:31 AM	H2 valve closed
7/4/2010	11:48:31 AM	BCl3 valve closed
7/4/2010	11:48:31 AM	PH3 valve closed
7/4/2010	11:48:31 AM	SiCl4 pre valve closed
7/4/2010	11:48:31 AM	SiCl4 post valve closed
7/4/2010	11:48:31 AM	Bubbler valve closed
7/4/2010	11:48:31 AM	Helium valve opened
7/4/2010	11:48:31 AM	Main Vac valve opened
7/4/2010	11:48:31 AM	Bypass valve opened
7/4/2010	11:48:31 AM	Helium MFC set to  100.000000
7/4/2010	11:48:31 AM	H2 MFC set to  0.000000
7/4/2010	11:48:31 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:31 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:31 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:31 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:31 AM	Tube furnace set to 0
7/4/2010	11:48:32 AM	Helium valve closed
7/4/2010	11:48:32 AM	H2 valve closed
7/4/2010	11:48:32 AM	BCl3 valve closed
7/4/2010	11:48:32 AM	PH3 valve closed
7/4/2010	11:48:32 AM	SiCl4 pre valve closed
7/4/2010	11:48:32 AM	SiCl4 post valve closed
7/4/2010	11:48:32 AM	Bubbler valve closed
7/4/2010	11:48:32 AM	Main Vac valve opened
7/4/2010	11:48:32 AM	Bypass valve opened
7/4/2010	11:48:32 AM	Helium MFC set to  0.000000
7/4/2010	11:48:32 AM	H2 MFC set to  0.000000
7/4/2010	11:48:32 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:32 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:32 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:32 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:32 AM	Tube furnace set to 0
7/4/2010	11:48:33 AM	Run finished at 11:48 AM
7/4/2010	11:48:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	11:48:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	11:48:44 AM	Recipe started at 11:48 AM
7/4/2010	11:48:44 AM	H2 valve closed
7/4/2010	11:48:44 AM	BCl3 valve closed
7/4/2010	11:48:44 AM	PH3 valve closed
7/4/2010	11:48:44 AM	SiCl4 pre valve closed
7/4/2010	11:48:44 AM	SiCl4 post valve closed
7/4/2010	11:48:44 AM	Main Vac valve closed
7/4/2010	11:48:44 AM	Bypass valve closed
7/4/2010	11:48:44 AM	Bubbler valve closed
7/4/2010	11:48:44 AM	Helium valve opened
7/4/2010	11:48:44 AM	Helium MFC set to  500.000000
7/4/2010	11:48:44 AM	H2 MFC set to  0.000000
7/4/2010	11:48:44 AM	BCl3 MFC set to  0.000000
7/4/2010	11:48:44 AM	PHl3 MFC set to  0.000000
7/4/2010	11:48:44 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:44 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:44 AM	Tube furnace set to 0
7/4/2010	11:50:05 AM	Helium valve closed
7/4/2010	11:50:05 AM	H2 valve closed
7/4/2010	11:50:05 AM	BCl3 valve closed
7/4/2010	11:50:05 AM	PH3 valve closed
7/4/2010	11:50:05 AM	SiCl4 pre valve closed
7/4/2010	11:50:05 AM	SiCl4 post valve closed
7/4/2010	11:50:05 AM	Main Vac valve closed
7/4/2010	11:50:05 AM	Bypass valve closed
7/4/2010	11:50:05 AM	Bubbler valve closed
7/4/2010	11:50:05 AM	Helium MFC set to  0.000000
7/4/2010	11:50:05 AM	H2 MFC set to  0.000000
7/4/2010	11:50:05 AM	BCl3 MFC set to  0.000000
7/4/2010	11:50:05 AM	PHl3 MFC set to  0.000000
7/4/2010	11:50:05 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:50:05 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:50:06 AM	Tube furnace set to 0
7/4/2010	11:50:21 AM	Helium valve closed
7/4/2010	11:50:21 AM	H2 valve closed
7/4/2010	11:50:21 AM	BCl3 valve closed
7/4/2010	11:50:21 AM	PH3 valve closed
7/4/2010	11:50:21 AM	SiCl4 pre valve closed
7/4/2010	11:50:21 AM	SiCl4 post valve closed
7/4/2010	11:50:21 AM	Main Vac valve closed
7/4/2010	11:50:21 AM	Bubbler valve closed
7/4/2010	11:50:21 AM	Bypass valve opened
7/4/2010	11:50:21 AM	Helium MFC set to  0.000000
7/4/2010	11:50:21 AM	H2 MFC set to  0.000000
7/4/2010	11:50:21 AM	BCl3 MFC set to  0.000000
7/4/2010	11:50:21 AM	PHl3 MFC set to  0.000000
7/4/2010	11:50:21 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:50:21 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:50:21 AM	Tube furnace set to 0
7/4/2010	11:50:55 AM	Helium valve closed
7/4/2010	11:50:55 AM	H2 valve closed
7/4/2010	11:50:55 AM	BCl3 valve closed
7/4/2010	11:50:55 AM	PH3 valve closed
7/4/2010	11:50:55 AM	SiCl4 pre valve closed
7/4/2010	11:50:55 AM	SiCl4 post valve closed
7/4/2010	11:50:55 AM	Bubbler valve closed
7/4/2010	11:50:55 AM	Main Vac valve opened
7/4/2010	11:50:55 AM	Bypass valve opened
7/4/2010	11:50:55 AM	Helium MFC set to  0.000000
7/4/2010	11:50:55 AM	H2 MFC set to  0.000000
7/4/2010	11:50:55 AM	BCl3 MFC set to  0.000000
7/4/2010	11:50:55 AM	PHl3 MFC set to  0.000000
7/4/2010	11:50:55 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:50:55 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:50:55 AM	Tube furnace set to 0
7/4/2010	11:55:55 AM	H2 valve closed
7/4/2010	11:55:55 AM	BCl3 valve closed
7/4/2010	11:55:55 AM	PH3 valve closed
7/4/2010	11:55:55 AM	SiCl4 pre valve closed
7/4/2010	11:55:55 AM	SiCl4 post valve closed
7/4/2010	11:55:55 AM	Main Vac valve closed
7/4/2010	11:55:55 AM	Bypass valve closed
7/4/2010	11:55:55 AM	Bubbler valve closed
7/4/2010	11:55:55 AM	Helium valve opened
7/4/2010	11:55:55 AM	Helium MFC set to  500.000000
7/4/2010	11:55:55 AM	H2 MFC set to  0.000000
7/4/2010	11:55:55 AM	BCl3 MFC set to  0.000000
7/4/2010	11:55:55 AM	PHl3 MFC set to  0.000000
7/4/2010	11:55:55 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:55:55 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:55:55 AM	Tube furnace set to 0
7/4/2010	11:57:17 AM	Helium valve closed
7/4/2010	11:57:17 AM	H2 valve closed
7/4/2010	11:57:17 AM	BCl3 valve closed
7/4/2010	11:57:17 AM	PH3 valve closed
7/4/2010	11:57:17 AM	SiCl4 pre valve closed
7/4/2010	11:57:17 AM	SiCl4 post valve closed
7/4/2010	11:57:17 AM	Main Vac valve closed
7/4/2010	11:57:17 AM	Bypass valve closed
7/4/2010	11:57:17 AM	Bubbler valve closed
7/4/2010	11:57:17 AM	Helium MFC set to  0.000000
7/4/2010	11:57:17 AM	H2 MFC set to  0.000000
7/4/2010	11:57:17 AM	BCl3 MFC set to  0.000000
7/4/2010	11:57:17 AM	PHl3 MFC set to  0.000000
7/4/2010	11:57:17 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:57:17 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:57:17 AM	Tube furnace set to 0
7/4/2010	11:57:32 AM	Helium valve closed
7/4/2010	11:57:32 AM	H2 valve closed
7/4/2010	11:57:32 AM	BCl3 valve closed
7/4/2010	11:57:32 AM	PH3 valve closed
7/4/2010	11:57:32 AM	SiCl4 pre valve closed
7/4/2010	11:57:32 AM	SiCl4 post valve closed
7/4/2010	11:57:32 AM	Main Vac valve closed
7/4/2010	11:57:32 AM	Bubbler valve closed
7/4/2010	11:57:32 AM	Bypass valve opened
7/4/2010	11:57:32 AM	Helium MFC set to  0.000000
7/4/2010	11:57:32 AM	H2 MFC set to  0.000000
7/4/2010	11:57:32 AM	BCl3 MFC set to  0.000000
7/4/2010	11:57:32 AM	PHl3 MFC set to  0.000000
7/4/2010	11:57:32 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:57:32 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:57:32 AM	Tube furnace set to 0
7/4/2010	11:58:06 AM	Helium valve closed
7/4/2010	11:58:06 AM	H2 valve closed
7/4/2010	11:58:06 AM	BCl3 valve closed
7/4/2010	11:58:06 AM	PH3 valve closed
7/4/2010	11:58:06 AM	SiCl4 pre valve closed
7/4/2010	11:58:06 AM	SiCl4 post valve closed
7/4/2010	11:58:06 AM	Bubbler valve closed
7/4/2010	11:58:06 AM	Main Vac valve opened
7/4/2010	11:58:06 AM	Bypass valve opened
7/4/2010	11:58:06 AM	Helium MFC set to  0.000000
7/4/2010	11:58:06 AM	H2 MFC set to  0.000000
7/4/2010	11:58:06 AM	BCl3 MFC set to  0.000000
7/4/2010	11:58:06 AM	PHl3 MFC set to  0.000000
7/4/2010	11:58:06 AM	SiCl4 MFC set to  0.000000
7/4/2010	11:58:06 AM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:58:06 AM	Tube furnace set to 0
7/4/2010	12:03:06 PM	H2 valve closed
7/4/2010	12:03:06 PM	BCl3 valve closed
7/4/2010	12:03:06 PM	PH3 valve closed
7/4/2010	12:03:06 PM	SiCl4 pre valve closed
7/4/2010	12:03:07 PM	SiCl4 post valve closed
7/4/2010	12:03:07 PM	Main Vac valve closed
7/4/2010	12:03:07 PM	Bypass valve closed
7/4/2010	12:03:07 PM	Bubbler valve closed
7/4/2010	12:03:07 PM	Helium valve opened
7/4/2010	12:03:07 PM	Helium MFC set to  500.000000
7/4/2010	12:03:07 PM	H2 MFC set to  0.000000
7/4/2010	12:03:07 PM	BCl3 MFC set to  0.000000
7/4/2010	12:03:07 PM	PHl3 MFC set to  0.000000
7/4/2010	12:03:07 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:03:07 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:03:07 PM	Tube furnace set to 0
7/4/2010	12:04:28 PM	Helium valve closed
7/4/2010	12:04:28 PM	H2 valve closed
7/4/2010	12:04:28 PM	BCl3 valve closed
7/4/2010	12:04:28 PM	PH3 valve closed
7/4/2010	12:04:28 PM	SiCl4 pre valve closed
7/4/2010	12:04:28 PM	SiCl4 post valve closed
7/4/2010	12:04:28 PM	Main Vac valve closed
7/4/2010	12:04:28 PM	Bypass valve closed
7/4/2010	12:04:28 PM	Bubbler valve closed
7/4/2010	12:04:28 PM	Helium MFC set to  0.000000
7/4/2010	12:04:28 PM	H2 MFC set to  0.000000
7/4/2010	12:04:28 PM	BCl3 MFC set to  0.000000
7/4/2010	12:04:28 PM	PHl3 MFC set to  0.000000
7/4/2010	12:04:28 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:04:28 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:04:28 PM	Tube furnace set to 0
7/4/2010	12:04:43 PM	Helium valve closed
7/4/2010	12:04:43 PM	H2 valve closed
7/4/2010	12:04:43 PM	BCl3 valve closed
7/4/2010	12:04:43 PM	PH3 valve closed
7/4/2010	12:04:43 PM	SiCl4 pre valve closed
7/4/2010	12:04:43 PM	SiCl4 post valve closed
7/4/2010	12:04:43 PM	Main Vac valve closed
7/4/2010	12:04:43 PM	Bubbler valve closed
7/4/2010	12:04:43 PM	Bypass valve opened
7/4/2010	12:04:43 PM	Helium MFC set to  0.000000
7/4/2010	12:04:43 PM	H2 MFC set to  0.000000
7/4/2010	12:04:43 PM	BCl3 MFC set to  0.000000
7/4/2010	12:04:43 PM	PHl3 MFC set to  0.000000
7/4/2010	12:04:43 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:04:43 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:04:44 PM	Tube furnace set to 0
7/4/2010	12:05:18 PM	Helium valve closed
7/4/2010	12:05:18 PM	H2 valve closed
7/4/2010	12:05:18 PM	BCl3 valve closed
7/4/2010	12:05:18 PM	PH3 valve closed
7/4/2010	12:05:18 PM	SiCl4 pre valve closed
7/4/2010	12:05:18 PM	SiCl4 post valve closed
7/4/2010	12:05:18 PM	Bubbler valve closed
7/4/2010	12:05:18 PM	Main Vac valve opened
7/4/2010	12:05:18 PM	Bypass valve opened
7/4/2010	12:05:18 PM	Helium MFC set to  0.000000
7/4/2010	12:05:18 PM	H2 MFC set to  0.000000
7/4/2010	12:05:18 PM	BCl3 MFC set to  0.000000
7/4/2010	12:05:18 PM	PHl3 MFC set to  0.000000
7/4/2010	12:05:18 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:05:18 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:05:18 PM	Tube furnace set to 0
7/4/2010	12:10:18 PM	Helium valve closed
7/4/2010	12:10:18 PM	H2 valve closed
7/4/2010	12:10:18 PM	BCl3 valve closed
7/4/2010	12:10:18 PM	PH3 valve closed
7/4/2010	12:10:18 PM	SiCl4 pre valve closed
7/4/2010	12:10:18 PM	SiCl4 post valve closed
7/4/2010	12:10:18 PM	Bubbler valve closed
7/4/2010	12:10:18 PM	Main Vac valve opened
7/4/2010	12:10:18 PM	Bypass valve opened
7/4/2010	12:10:18 PM	Helium MFC set to  0.000000
7/4/2010	12:10:18 PM	H2 MFC set to  0.000000
7/4/2010	12:10:18 PM	BCl3 MFC set to  0.000000
7/4/2010	12:10:18 PM	PHl3 MFC set to  0.000000
7/4/2010	12:10:18 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:10:18 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:10:18 PM	Tube furnace set to 0
7/4/2010	12:10:19 PM	Run finished at 12:10 PM
7/4/2010	12:10:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	12:16:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	12:16:13 PM	Recipe started at 12:16 PM
7/4/2010	12:16:13 PM	Helium valve closed
7/4/2010	12:16:13 PM	H2 valve closed
7/4/2010	12:16:13 PM	BCl3 valve closed
7/4/2010	12:16:13 PM	PH3 valve closed
7/4/2010	12:16:13 PM	SiCl4 pre valve closed
7/4/2010	12:16:13 PM	SiCl4 post valve closed
7/4/2010	12:16:13 PM	Main Vac valve closed
7/4/2010	12:16:13 PM	Bubbler valve closed
7/4/2010	12:16:13 PM	Bypass valve opened
7/4/2010	12:16:13 PM	Helium MFC set to  0.000000
7/4/2010	12:16:13 PM	H2 MFC set to  0.000000
7/4/2010	12:16:13 PM	BCl3 MFC set to  0.000000
7/4/2010	12:16:13 PM	PHl3 MFC set to  0.000000
7/4/2010	12:16:13 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:16:13 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:16:13 PM	Tube furnace set to 0
7/4/2010	12:16:13 PM	Helium valve closed
7/4/2010	12:16:13 PM	H2 valve closed
7/4/2010	12:16:13 PM	BCl3 valve closed
7/4/2010	12:16:13 PM	PH3 valve closed
7/4/2010	12:16:13 PM	SiCl4 pre valve closed
7/4/2010	12:16:13 PM	SiCl4 post valve closed
7/4/2010	12:16:13 PM	Bubbler valve closed
7/4/2010	12:16:13 PM	Main Vac valve opened
7/4/2010	12:16:13 PM	Bypass valve opened
7/4/2010	12:16:13 PM	Helium MFC set to  0.000000
7/4/2010	12:16:13 PM	H2 MFC set to  0.000000
7/4/2010	12:16:13 PM	BCl3 MFC set to  0.000000
7/4/2010	12:16:13 PM	PHl3 MFC set to  0.000000
7/4/2010	12:16:13 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:16:13 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:16:14 PM	Tube furnace set to 0
7/4/2010	12:17:14 PM	H2 valve closed
7/4/2010	12:17:14 PM	BCl3 valve closed
7/4/2010	12:17:14 PM	PH3 valve closed
7/4/2010	12:17:14 PM	SiCl4 pre valve closed
7/4/2010	12:17:14 PM	SiCl4 post valve closed
7/4/2010	12:17:14 PM	Bubbler valve closed
7/4/2010	12:17:14 PM	Helium valve opened
7/4/2010	12:17:14 PM	Main Vac valve opened
7/4/2010	12:17:14 PM	Bypass valve opened
7/4/2010	12:17:14 PM	Helium MFC set to  100.000000
7/4/2010	12:17:14 PM	H2 MFC set to  0.000000
7/4/2010	12:17:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:17:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:17:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:17:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:17:14 PM	Tube furnace set to 0
7/4/2010	12:26:14 PM	Helium valve closed
7/4/2010	12:26:14 PM	H2 valve closed
7/4/2010	12:26:14 PM	BCl3 valve closed
7/4/2010	12:26:14 PM	PH3 valve closed
7/4/2010	12:26:14 PM	SiCl4 pre valve closed
7/4/2010	12:26:14 PM	SiCl4 post valve closed
7/4/2010	12:26:14 PM	Bubbler valve closed
7/4/2010	12:26:14 PM	Main Vac valve opened
7/4/2010	12:26:14 PM	Bypass valve opened
7/4/2010	12:26:14 PM	Helium MFC set to  0.000000
7/4/2010	12:26:14 PM	H2 MFC set to  0.000000
7/4/2010	12:26:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:26:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:26:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:26:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:26:14 PM	Tube furnace set to 0
7/4/2010	12:27:14 PM	H2 valve closed
7/4/2010	12:27:14 PM	BCl3 valve closed
7/4/2010	12:27:14 PM	PH3 valve closed
7/4/2010	12:27:14 PM	SiCl4 pre valve closed
7/4/2010	12:27:14 PM	SiCl4 post valve closed
7/4/2010	12:27:14 PM	Bubbler valve closed
7/4/2010	12:27:14 PM	Helium valve opened
7/4/2010	12:27:14 PM	Main Vac valve opened
7/4/2010	12:27:14 PM	Bypass valve opened
7/4/2010	12:27:14 PM	Helium MFC set to  100.000000
7/4/2010	12:27:14 PM	H2 MFC set to  0.000000
7/4/2010	12:27:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:27:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:27:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:27:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:27:14 PM	Tube furnace set to 0
7/4/2010	12:36:14 PM	Helium valve closed
7/4/2010	12:36:14 PM	H2 valve closed
7/4/2010	12:36:14 PM	BCl3 valve closed
7/4/2010	12:36:14 PM	PH3 valve closed
7/4/2010	12:36:14 PM	SiCl4 pre valve closed
7/4/2010	12:36:14 PM	SiCl4 post valve closed
7/4/2010	12:36:14 PM	Bubbler valve closed
7/4/2010	12:36:14 PM	Main Vac valve opened
7/4/2010	12:36:14 PM	Bypass valve opened
7/4/2010	12:36:14 PM	Helium MFC set to  0.000000
7/4/2010	12:36:14 PM	H2 MFC set to  0.000000
7/4/2010	12:36:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:36:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:36:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:36:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:36:14 PM	Tube furnace set to 0
7/4/2010	12:37:14 PM	H2 valve closed
7/4/2010	12:37:14 PM	BCl3 valve closed
7/4/2010	12:37:14 PM	PH3 valve closed
7/4/2010	12:37:14 PM	SiCl4 pre valve closed
7/4/2010	12:37:14 PM	SiCl4 post valve closed
7/4/2010	12:37:14 PM	Bubbler valve closed
7/4/2010	12:37:14 PM	Helium valve opened
7/4/2010	12:37:14 PM	Main Vac valve opened
7/4/2010	12:37:14 PM	Bypass valve opened
7/4/2010	12:37:14 PM	Helium MFC set to  100.000000
7/4/2010	12:37:14 PM	H2 MFC set to  0.000000
7/4/2010	12:37:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:37:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:37:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:37:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:37:14 PM	Tube furnace set to 0
7/4/2010	12:46:14 PM	Helium valve closed
7/4/2010	12:46:14 PM	H2 valve closed
7/4/2010	12:46:14 PM	BCl3 valve closed
7/4/2010	12:46:14 PM	PH3 valve closed
7/4/2010	12:46:14 PM	SiCl4 pre valve closed
7/4/2010	12:46:14 PM	SiCl4 post valve closed
7/4/2010	12:46:14 PM	Bubbler valve closed
7/4/2010	12:46:14 PM	Main Vac valve opened
7/4/2010	12:46:14 PM	Bypass valve opened
7/4/2010	12:46:14 PM	Helium MFC set to  0.000000
7/4/2010	12:46:14 PM	H2 MFC set to  0.000000
7/4/2010	12:46:14 PM	BCl3 MFC set to  0.000000
7/4/2010	12:46:14 PM	PHl3 MFC set to  0.000000
7/4/2010	12:46:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	12:46:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	12:46:15 PM	Tube furnace set to 0
7/4/2010	12:46:16 PM	Run finished at 12:46 PM
7/4/2010	12:46:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	2:35:46 PM	Bypass valve closed
7/4/2010	2:35:47 PM	Main Vac valve closed
7/4/2010	2:36:05 PM	Bypass valve opened
7/4/2010	2:36:06 PM	Main Vac valve opened
7/4/2010	2:37:48 PM	Recipe started at 2:37 PM
7/4/2010	2:37:48 PM	Helium valve closed
7/4/2010	2:37:48 PM	BCl3 valve closed
7/4/2010	2:37:48 PM	PH3 valve closed
7/4/2010	2:37:48 PM	SiCl4 pre valve closed
7/4/2010	2:37:48 PM	SiCl4 post valve closed
7/4/2010	2:37:48 PM	Main Vac valve closed
7/4/2010	2:37:48 PM	Bypass valve closed
7/4/2010	2:37:48 PM	Bubbler valve closed
7/4/2010	2:37:48 PM	H2 valve opened
7/4/2010	2:37:48 PM	Helium MFC set to  0.000000
7/4/2010	2:37:48 PM	H2 MFC set to  500.000000
7/4/2010	2:37:48 PM	BCl3 MFC set to  0.000000
7/4/2010	2:37:48 PM	PHl3 MFC set to  0.000000
7/4/2010	2:37:48 PM	SiCl4 MFC set to  0.000000
7/4/2010	2:37:48 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	2:37:48 PM	Tube furnace set to 0
7/4/2010	2:39:10 PM	Helium valve closed
7/4/2010	2:39:10 PM	BCl3 valve closed
7/4/2010	2:39:10 PM	PH3 valve closed
7/4/2010	2:39:10 PM	SiCl4 pre valve closed
7/4/2010	2:39:10 PM	SiCl4 post valve closed
7/4/2010	2:39:10 PM	Main Vac valve closed
7/4/2010	2:39:10 PM	Bypass valve closed
7/4/2010	2:39:10 PM	H2 valve opened
7/4/2010	2:39:10 PM	Bubbler valve opened
7/4/2010	2:39:10 PM	Helium MFC set to  0.000000
7/4/2010	2:39:10 PM	H2 MFC set to  500.000000
7/4/2010	2:39:10 PM	BCl3 MFC set to  0.000000
7/4/2010	2:39:10 PM	PHl3 MFC set to  0.000000
7/4/2010	2:39:10 PM	SiCl4 MFC set to  0.000000
7/4/2010	2:39:10 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	2:39:11 PM	Tube furnace set to 1000
7/4/2010	2:59:11 PM	Helium valve closed
7/4/2010	2:59:11 PM	PH3 valve closed
7/4/2010	2:59:11 PM	Main Vac valve closed
7/4/2010	2:59:11 PM	Bypass valve closed
7/4/2010	2:59:11 PM	H2 valve opened
7/4/2010	2:59:11 PM	BCl3 valve opened
7/4/2010	2:59:11 PM	SiCl4 pre valve opened
7/4/2010	2:59:11 PM	SiCl4 post valve opened
7/4/2010	2:59:11 PM	Bubbler valve opened
7/4/2010	2:59:11 PM	Helium MFC set to  0.000000
7/4/2010	2:59:11 PM	H2 MFC set to  500.000000
7/4/2010	2:59:11 PM	BCl3 MFC set to  35.000000
7/4/2010	2:59:11 PM	PHl3 MFC set to  0.000000
7/4/2010	2:59:11 PM	SiCl4 MFC set to  50.000000
7/4/2010	2:59:11 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	2:59:11 PM	Tube furnace set to 1000
7/4/2010	3:19:11 PM	H2 valve closed
7/4/2010	3:19:11 PM	BCl3 valve closed
7/4/2010	3:19:11 PM	PH3 valve closed
7/4/2010	3:19:11 PM	SiCl4 pre valve closed
7/4/2010	3:19:11 PM	SiCl4 post valve closed
7/4/2010	3:19:11 PM	Main Vac valve closed
7/4/2010	3:19:11 PM	Bypass valve closed
7/4/2010	3:19:11 PM	Helium valve opened
7/4/2010	3:19:11 PM	Bubbler valve opened
7/4/2010	3:19:11 PM	Helium MFC set to  500.000000
7/4/2010	3:19:11 PM	H2 MFC set to  0.000000
7/4/2010	3:19:11 PM	BCl3 MFC set to  0.000000
7/4/2010	3:19:11 PM	PHl3 MFC set to  0.000000
7/4/2010	3:19:11 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:19:11 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:19:11 PM	Tube furnace set to 0
7/4/2010	3:39:11 PM	Helium valve closed
7/4/2010	3:39:11 PM	H2 valve closed
7/4/2010	3:39:11 PM	BCl3 valve closed
7/4/2010	3:39:11 PM	PH3 valve closed
7/4/2010	3:39:11 PM	SiCl4 pre valve closed
7/4/2010	3:39:11 PM	SiCl4 post valve closed
7/4/2010	3:39:11 PM	Main Vac valve closed
7/4/2010	3:39:11 PM	Bypass valve closed
7/4/2010	3:39:11 PM	Bubbler valve closed
7/4/2010	3:39:11 PM	Helium MFC set to  0.000000
7/4/2010	3:39:11 PM	H2 MFC set to  0.000000
7/4/2010	3:39:11 PM	BCl3 MFC set to  0.000000
7/4/2010	3:39:11 PM	PHl3 MFC set to  0.000000
7/4/2010	3:39:11 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:39:11 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:39:11 PM	Tube furnace set to 0
7/4/2010	3:39:11 PM	Run finished at 3:39 PM
7/4/2010	3:48:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	3:48:48 PM	Recipe started at 3:48 PM
7/4/2010	3:48:48 PM	H2 valve closed
7/4/2010	3:48:48 PM	BCl3 valve closed
7/4/2010	3:48:48 PM	PH3 valve closed
7/4/2010	3:48:48 PM	SiCl4 pre valve closed
7/4/2010	3:48:48 PM	SiCl4 post valve closed
7/4/2010	3:48:48 PM	Main Vac valve closed
7/4/2010	3:48:48 PM	Bypass valve closed
7/4/2010	3:48:48 PM	Bubbler valve closed
7/4/2010	3:48:48 PM	Helium valve opened
7/4/2010	3:48:48 PM	Helium MFC set to  500.000000
7/4/2010	3:48:48 PM	H2 MFC set to  0.000000
7/4/2010	3:48:48 PM	BCl3 MFC set to  0.000000
7/4/2010	3:48:48 PM	PHl3 MFC set to  0.000000
7/4/2010	3:48:48 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:48:48 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:48:48 PM	Tube furnace set to 0
7/4/2010	3:48:50 PM	Helium valve closed
7/4/2010	3:48:50 PM	H2 valve closed
7/4/2010	3:48:50 PM	BCl3 valve closed
7/4/2010	3:48:50 PM	PH3 valve closed
7/4/2010	3:48:50 PM	SiCl4 pre valve closed
7/4/2010	3:48:50 PM	SiCl4 post valve closed
7/4/2010	3:48:50 PM	Main Vac valve closed
7/4/2010	3:48:50 PM	Bypass valve closed
7/4/2010	3:48:50 PM	Bubbler valve closed
7/4/2010	3:48:50 PM	Helium MFC set to  0.000000
7/4/2010	3:48:50 PM	H2 MFC set to  0.000000
7/4/2010	3:48:50 PM	BCl3 MFC set to  0.000000
7/4/2010	3:48:50 PM	PHl3 MFC set to  0.000000
7/4/2010	3:48:50 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:48:50 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:48:50 PM	Tube furnace set to 0
7/4/2010	3:49:05 PM	Helium valve closed
7/4/2010	3:49:05 PM	H2 valve closed
7/4/2010	3:49:05 PM	BCl3 valve closed
7/4/2010	3:49:05 PM	PH3 valve closed
7/4/2010	3:49:05 PM	SiCl4 pre valve closed
7/4/2010	3:49:05 PM	SiCl4 post valve closed
7/4/2010	3:49:05 PM	Main Vac valve closed
7/4/2010	3:49:05 PM	Bubbler valve closed
7/4/2010	3:49:05 PM	Bypass valve opened
7/4/2010	3:49:05 PM	Helium MFC set to  0.000000
7/4/2010	3:49:05 PM	H2 MFC set to  0.000000
7/4/2010	3:49:05 PM	BCl3 MFC set to  0.000000
7/4/2010	3:49:05 PM	PHl3 MFC set to  0.000000
7/4/2010	3:49:05 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:49:05 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:49:06 PM	Tube furnace set to 0
7/4/2010	3:49:52 PM	Helium valve closed
7/4/2010	3:49:52 PM	H2 valve closed
7/4/2010	3:49:52 PM	BCl3 valve closed
7/4/2010	3:49:52 PM	PH3 valve closed
7/4/2010	3:49:52 PM	SiCl4 pre valve closed
7/4/2010	3:49:52 PM	SiCl4 post valve closed
7/4/2010	3:49:52 PM	Bubbler valve closed
7/4/2010	3:49:52 PM	Main Vac valve opened
7/4/2010	3:49:52 PM	Bypass valve opened
7/4/2010	3:49:52 PM	Helium MFC set to  0.000000
7/4/2010	3:49:52 PM	H2 MFC set to  0.000000
7/4/2010	3:49:52 PM	BCl3 MFC set to  0.000000
7/4/2010	3:49:52 PM	PHl3 MFC set to  0.000000
7/4/2010	3:49:52 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:49:52 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:49:52 PM	Tube furnace set to 0
7/4/2010	3:54:52 PM	H2 valve closed
7/4/2010	3:54:52 PM	BCl3 valve closed
7/4/2010	3:54:52 PM	PH3 valve closed
7/4/2010	3:54:52 PM	SiCl4 pre valve closed
7/4/2010	3:54:52 PM	SiCl4 post valve closed
7/4/2010	3:54:52 PM	Main Vac valve closed
7/4/2010	3:54:52 PM	Bypass valve closed
7/4/2010	3:54:52 PM	Bubbler valve closed
7/4/2010	3:54:52 PM	Helium valve opened
7/4/2010	3:54:52 PM	Helium MFC set to  500.000000
7/4/2010	3:54:52 PM	H2 MFC set to  0.000000
7/4/2010	3:54:52 PM	BCl3 MFC set to  0.000000
7/4/2010	3:54:52 PM	PHl3 MFC set to  0.000000
7/4/2010	3:54:52 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:54:52 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:54:52 PM	Tube furnace set to 0
7/4/2010	3:56:12 PM	Helium valve closed
7/4/2010	3:56:12 PM	H2 valve closed
7/4/2010	3:56:12 PM	BCl3 valve closed
7/4/2010	3:56:12 PM	PH3 valve closed
7/4/2010	3:56:12 PM	SiCl4 pre valve closed
7/4/2010	3:56:12 PM	SiCl4 post valve closed
7/4/2010	3:56:12 PM	Main Vac valve closed
7/4/2010	3:56:12 PM	Bypass valve closed
7/4/2010	3:56:12 PM	Bubbler valve closed
7/4/2010	3:56:12 PM	Helium MFC set to  0.000000
7/4/2010	3:56:12 PM	H2 MFC set to  0.000000
7/4/2010	3:56:12 PM	BCl3 MFC set to  0.000000
7/4/2010	3:56:12 PM	PHl3 MFC set to  0.000000
7/4/2010	3:56:12 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:56:12 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:56:12 PM	Tube furnace set to 0
7/4/2010	3:56:27 PM	Helium valve closed
7/4/2010	3:56:27 PM	H2 valve closed
7/4/2010	3:56:27 PM	BCl3 valve closed
7/4/2010	3:56:27 PM	PH3 valve closed
7/4/2010	3:56:27 PM	SiCl4 pre valve closed
7/4/2010	3:56:27 PM	SiCl4 post valve closed
7/4/2010	3:56:27 PM	Main Vac valve closed
7/4/2010	3:56:27 PM	Bubbler valve closed
7/4/2010	3:56:27 PM	Bypass valve opened
7/4/2010	3:56:27 PM	Helium MFC set to  0.000000
7/4/2010	3:56:27 PM	H2 MFC set to  0.000000
7/4/2010	3:56:27 PM	BCl3 MFC set to  0.000000
7/4/2010	3:56:27 PM	PHl3 MFC set to  0.000000
7/4/2010	3:56:27 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:56:27 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:56:27 PM	Tube furnace set to 0
7/4/2010	3:57:00 PM	Helium valve closed
7/4/2010	3:57:00 PM	H2 valve closed
7/4/2010	3:57:00 PM	BCl3 valve closed
7/4/2010	3:57:00 PM	PH3 valve closed
7/4/2010	3:57:00 PM	SiCl4 pre valve closed
7/4/2010	3:57:00 PM	SiCl4 post valve closed
7/4/2010	3:57:00 PM	Bubbler valve closed
7/4/2010	3:57:00 PM	Main Vac valve opened
7/4/2010	3:57:00 PM	Bypass valve opened
7/4/2010	3:57:00 PM	Helium MFC set to  0.000000
7/4/2010	3:57:00 PM	H2 MFC set to  0.000000
7/4/2010	3:57:00 PM	BCl3 MFC set to  0.000000
7/4/2010	3:57:00 PM	PHl3 MFC set to  0.000000
7/4/2010	3:57:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	3:57:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	3:57:00 PM	Tube furnace set to 0
7/4/2010	4:02:00 PM	H2 valve closed
7/4/2010	4:02:00 PM	BCl3 valve closed
7/4/2010	4:02:00 PM	PH3 valve closed
7/4/2010	4:02:00 PM	SiCl4 pre valve closed
7/4/2010	4:02:00 PM	SiCl4 post valve closed
7/4/2010	4:02:00 PM	Main Vac valve closed
7/4/2010	4:02:00 PM	Bypass valve closed
7/4/2010	4:02:00 PM	Bubbler valve closed
7/4/2010	4:02:00 PM	Helium valve opened
7/4/2010	4:02:00 PM	Helium MFC set to  500.000000
7/4/2010	4:02:00 PM	H2 MFC set to  0.000000
7/4/2010	4:02:00 PM	BCl3 MFC set to  0.000000
7/4/2010	4:02:00 PM	PHl3 MFC set to  0.000000
7/4/2010	4:02:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:02:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:02:01 PM	Tube furnace set to 0
7/4/2010	4:03:21 PM	Helium valve closed
7/4/2010	4:03:21 PM	H2 valve closed
7/4/2010	4:03:21 PM	BCl3 valve closed
7/4/2010	4:03:21 PM	PH3 valve closed
7/4/2010	4:03:21 PM	SiCl4 pre valve closed
7/4/2010	4:03:21 PM	SiCl4 post valve closed
7/4/2010	4:03:21 PM	Main Vac valve closed
7/4/2010	4:03:21 PM	Bypass valve closed
7/4/2010	4:03:21 PM	Bubbler valve closed
7/4/2010	4:03:21 PM	Helium MFC set to  0.000000
7/4/2010	4:03:21 PM	H2 MFC set to  0.000000
7/4/2010	4:03:21 PM	BCl3 MFC set to  0.000000
7/4/2010	4:03:21 PM	PHl3 MFC set to  0.000000
7/4/2010	4:03:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:03:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:03:21 PM	Tube furnace set to 0
7/4/2010	4:03:36 PM	Helium valve closed
7/4/2010	4:03:36 PM	H2 valve closed
7/4/2010	4:03:36 PM	BCl3 valve closed
7/4/2010	4:03:36 PM	PH3 valve closed
7/4/2010	4:03:36 PM	SiCl4 pre valve closed
7/4/2010	4:03:36 PM	SiCl4 post valve closed
7/4/2010	4:03:36 PM	Main Vac valve closed
7/4/2010	4:03:36 PM	Bubbler valve closed
7/4/2010	4:03:36 PM	Bypass valve opened
7/4/2010	4:03:36 PM	Helium MFC set to  0.000000
7/4/2010	4:03:36 PM	H2 MFC set to  0.000000
7/4/2010	4:03:36 PM	BCl3 MFC set to  0.000000
7/4/2010	4:03:36 PM	PHl3 MFC set to  0.000000
7/4/2010	4:03:36 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:03:36 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:03:36 PM	Tube furnace set to 0
7/4/2010	4:04:09 PM	Helium valve closed
7/4/2010	4:04:09 PM	H2 valve closed
7/4/2010	4:04:10 PM	BCl3 valve closed
7/4/2010	4:04:10 PM	PH3 valve closed
7/4/2010	4:04:10 PM	SiCl4 pre valve closed
7/4/2010	4:04:10 PM	SiCl4 post valve closed
7/4/2010	4:04:10 PM	Bubbler valve closed
7/4/2010	4:04:10 PM	Main Vac valve opened
7/4/2010	4:04:10 PM	Bypass valve opened
7/4/2010	4:04:10 PM	Helium MFC set to  0.000000
7/4/2010	4:04:10 PM	H2 MFC set to  0.000000
7/4/2010	4:04:10 PM	BCl3 MFC set to  0.000000
7/4/2010	4:04:10 PM	PHl3 MFC set to  0.000000
7/4/2010	4:04:10 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:04:10 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:04:10 PM	Tube furnace set to 0
7/4/2010	4:09:10 PM	Helium valve closed
7/4/2010	4:09:10 PM	H2 valve closed
7/4/2010	4:09:10 PM	BCl3 valve closed
7/4/2010	4:09:10 PM	PH3 valve closed
7/4/2010	4:09:10 PM	SiCl4 pre valve closed
7/4/2010	4:09:10 PM	SiCl4 post valve closed
7/4/2010	4:09:10 PM	Bubbler valve closed
7/4/2010	4:09:10 PM	Main Vac valve opened
7/4/2010	4:09:10 PM	Bypass valve opened
7/4/2010	4:09:10 PM	Helium MFC set to  0.000000
7/4/2010	4:09:10 PM	H2 MFC set to  0.000000
7/4/2010	4:09:10 PM	BCl3 MFC set to  0.000000
7/4/2010	4:09:10 PM	PHl3 MFC set to  0.000000
7/4/2010	4:09:10 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:09:10 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:09:10 PM	Tube furnace set to 0
7/4/2010	4:09:11 PM	Run finished at 4:09 PM
7/4/2010	4:09:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	4:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	4:09:36 PM	Recipe started at 4:09 PM
7/4/2010	4:09:36 PM	Helium valve closed
7/4/2010	4:09:36 PM	H2 valve closed
7/4/2010	4:09:36 PM	BCl3 valve closed
7/4/2010	4:09:36 PM	PH3 valve closed
7/4/2010	4:09:36 PM	SiCl4 pre valve closed
7/4/2010	4:09:36 PM	SiCl4 post valve closed
7/4/2010	4:09:36 PM	Main Vac valve closed
7/4/2010	4:09:36 PM	Bubbler valve closed
7/4/2010	4:09:36 PM	Bypass valve opened
7/4/2010	4:09:36 PM	Helium MFC set to  0.000000
7/4/2010	4:09:36 PM	H2 MFC set to  0.000000
7/4/2010	4:09:36 PM	BCl3 MFC set to  0.000000
7/4/2010	4:09:36 PM	PHl3 MFC set to  0.000000
7/4/2010	4:09:36 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:09:36 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:09:37 PM	Tube furnace set to 0
7/4/2010	4:09:37 PM	Helium valve closed
7/4/2010	4:09:37 PM	H2 valve closed
7/4/2010	4:09:37 PM	BCl3 valve closed
7/4/2010	4:09:37 PM	PH3 valve closed
7/4/2010	4:09:37 PM	SiCl4 pre valve closed
7/4/2010	4:09:37 PM	SiCl4 post valve closed
7/4/2010	4:09:37 PM	Bubbler valve closed
7/4/2010	4:09:37 PM	Main Vac valve opened
7/4/2010	4:09:37 PM	Bypass valve opened
7/4/2010	4:09:37 PM	Helium MFC set to  0.000000
7/4/2010	4:09:37 PM	H2 MFC set to  0.000000
7/4/2010	4:09:37 PM	BCl3 MFC set to  0.000000
7/4/2010	4:09:37 PM	PHl3 MFC set to  0.000000
7/4/2010	4:09:37 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:09:37 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:09:37 PM	Tube furnace set to 0
7/4/2010	4:10:37 PM	H2 valve closed
7/4/2010	4:10:37 PM	BCl3 valve closed
7/4/2010	4:10:37 PM	PH3 valve closed
7/4/2010	4:10:37 PM	SiCl4 pre valve closed
7/4/2010	4:10:37 PM	SiCl4 post valve closed
7/4/2010	4:10:37 PM	Bubbler valve closed
7/4/2010	4:10:37 PM	Helium valve opened
7/4/2010	4:10:37 PM	Main Vac valve opened
7/4/2010	4:10:37 PM	Bypass valve opened
7/4/2010	4:10:37 PM	Helium MFC set to  100.000000
7/4/2010	4:10:37 PM	H2 MFC set to  0.000000
7/4/2010	4:10:37 PM	BCl3 MFC set to  0.000000
7/4/2010	4:10:37 PM	PHl3 MFC set to  0.000000
7/4/2010	4:10:37 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:10:37 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:10:37 PM	Tube furnace set to 0
7/4/2010	4:19:37 PM	Helium valve closed
7/4/2010	4:19:37 PM	H2 valve closed
7/4/2010	4:19:37 PM	BCl3 valve closed
7/4/2010	4:19:37 PM	PH3 valve closed
7/4/2010	4:19:37 PM	SiCl4 pre valve closed
7/4/2010	4:19:37 PM	SiCl4 post valve closed
7/4/2010	4:19:37 PM	Bubbler valve closed
7/4/2010	4:19:37 PM	Main Vac valve opened
7/4/2010	4:19:37 PM	Bypass valve opened
7/4/2010	4:19:37 PM	Helium MFC set to  0.000000
7/4/2010	4:19:37 PM	H2 MFC set to  0.000000
7/4/2010	4:19:37 PM	BCl3 MFC set to  0.000000
7/4/2010	4:19:37 PM	PHl3 MFC set to  0.000000
7/4/2010	4:19:37 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:19:37 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:19:37 PM	Tube furnace set to 0
7/4/2010	4:20:37 PM	H2 valve closed
7/4/2010	4:20:37 PM	BCl3 valve closed
7/4/2010	4:20:37 PM	PH3 valve closed
7/4/2010	4:20:37 PM	SiCl4 pre valve closed
7/4/2010	4:20:37 PM	SiCl4 post valve closed
7/4/2010	4:20:37 PM	Bubbler valve closed
7/4/2010	4:20:37 PM	Helium valve opened
7/4/2010	4:20:37 PM	Main Vac valve opened
7/4/2010	4:20:37 PM	Bypass valve opened
7/4/2010	4:20:37 PM	Helium MFC set to  100.000000
7/4/2010	4:20:37 PM	H2 MFC set to  0.000000
7/4/2010	4:20:37 PM	BCl3 MFC set to  0.000000
7/4/2010	4:20:37 PM	PHl3 MFC set to  0.000000
7/4/2010	4:20:37 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:20:37 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:20:38 PM	Tube furnace set to 0
7/4/2010	4:29:38 PM	Helium valve closed
7/4/2010	4:29:38 PM	H2 valve closed
7/4/2010	4:29:38 PM	BCl3 valve closed
7/4/2010	4:29:38 PM	PH3 valve closed
7/4/2010	4:29:38 PM	SiCl4 pre valve closed
7/4/2010	4:29:38 PM	SiCl4 post valve closed
7/4/2010	4:29:38 PM	Bubbler valve closed
7/4/2010	4:29:38 PM	Main Vac valve opened
7/4/2010	4:29:38 PM	Bypass valve opened
7/4/2010	4:29:38 PM	Helium MFC set to  0.000000
7/4/2010	4:29:38 PM	H2 MFC set to  0.000000
7/4/2010	4:29:38 PM	BCl3 MFC set to  0.000000
7/4/2010	4:29:38 PM	PHl3 MFC set to  0.000000
7/4/2010	4:29:38 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:29:38 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:29:38 PM	Tube furnace set to 0
7/4/2010	4:30:38 PM	H2 valve closed
7/4/2010	4:30:38 PM	BCl3 valve closed
7/4/2010	4:30:38 PM	PH3 valve closed
7/4/2010	4:30:38 PM	SiCl4 pre valve closed
7/4/2010	4:30:38 PM	SiCl4 post valve closed
7/4/2010	4:30:38 PM	Bubbler valve closed
7/4/2010	4:30:38 PM	Helium valve opened
7/4/2010	4:30:38 PM	Main Vac valve opened
7/4/2010	4:30:38 PM	Bypass valve opened
7/4/2010	4:30:38 PM	Helium MFC set to  100.000000
7/4/2010	4:30:38 PM	H2 MFC set to  0.000000
7/4/2010	4:30:38 PM	BCl3 MFC set to  0.000000
7/4/2010	4:30:38 PM	PHl3 MFC set to  0.000000
7/4/2010	4:30:38 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:30:38 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:30:38 PM	Tube furnace set to 0
7/4/2010	4:39:38 PM	Helium valve closed
7/4/2010	4:39:38 PM	H2 valve closed
7/4/2010	4:39:38 PM	BCl3 valve closed
7/4/2010	4:39:38 PM	PH3 valve closed
7/4/2010	4:39:38 PM	SiCl4 pre valve closed
7/4/2010	4:39:38 PM	SiCl4 post valve closed
7/4/2010	4:39:38 PM	Bubbler valve closed
7/4/2010	4:39:38 PM	Main Vac valve opened
7/4/2010	4:39:38 PM	Bypass valve opened
7/4/2010	4:39:38 PM	Helium MFC set to  0.000000
7/4/2010	4:39:38 PM	H2 MFC set to  0.000000
7/4/2010	4:39:38 PM	BCl3 MFC set to  0.000000
7/4/2010	4:39:38 PM	PHl3 MFC set to  0.000000
7/4/2010	4:39:38 PM	SiCl4 MFC set to  0.000000
7/4/2010	4:39:38 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	4:39:38 PM	Tube furnace set to 0
7/4/2010	4:39:39 PM	Run finished at 4:39 PM
7/4/2010	4:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	5:47:38 PM	Recipe started at 5:47 PM
7/4/2010	5:47:38 PM	Helium valve closed
7/4/2010	5:47:38 PM	BCl3 valve closed
7/4/2010	5:47:38 PM	PH3 valve closed
7/4/2010	5:47:38 PM	SiCl4 pre valve closed
7/4/2010	5:47:38 PM	SiCl4 post valve closed
7/4/2010	5:47:38 PM	Main Vac valve closed
7/4/2010	5:47:38 PM	Bypass valve closed
7/4/2010	5:47:38 PM	Bubbler valve closed
7/4/2010	5:47:38 PM	H2 valve opened
7/4/2010	5:47:38 PM	Helium MFC set to  0.000000
7/4/2010	5:47:38 PM	H2 MFC set to  500.000000
7/4/2010	5:47:38 PM	BCl3 MFC set to  0.000000
7/4/2010	5:47:38 PM	PHl3 MFC set to  0.000000
7/4/2010	5:47:38 PM	SiCl4 MFC set to  0.000000
7/4/2010	5:47:38 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	5:47:38 PM	Tube furnace set to 0
7/4/2010	5:48:58 PM	Helium valve closed
7/4/2010	5:48:58 PM	BCl3 valve closed
7/4/2010	5:48:58 PM	PH3 valve closed
7/4/2010	5:48:58 PM	SiCl4 pre valve closed
7/4/2010	5:48:58 PM	SiCl4 post valve closed
7/4/2010	5:48:58 PM	Main Vac valve closed
7/4/2010	5:48:58 PM	Bypass valve closed
7/4/2010	5:48:58 PM	H2 valve opened
7/4/2010	5:48:58 PM	Bubbler valve opened
7/4/2010	5:48:58 PM	Helium MFC set to  0.000000
7/4/2010	5:48:58 PM	H2 MFC set to  500.000000
7/4/2010	5:48:58 PM	BCl3 MFC set to  0.000000
7/4/2010	5:48:58 PM	PHl3 MFC set to  0.000000
7/4/2010	5:48:58 PM	SiCl4 MFC set to  0.000000
7/4/2010	5:48:58 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	5:48:59 PM	Tube furnace set to 1000
7/4/2010	6:08:59 PM	Helium valve closed
7/4/2010	6:08:59 PM	PH3 valve closed
7/4/2010	6:08:59 PM	Main Vac valve closed
7/4/2010	6:08:59 PM	Bypass valve closed
7/4/2010	6:08:59 PM	H2 valve opened
7/4/2010	6:08:59 PM	BCl3 valve opened
7/4/2010	6:08:59 PM	SiCl4 pre valve opened
7/4/2010	6:08:59 PM	SiCl4 post valve opened
7/4/2010	6:08:59 PM	Bubbler valve opened
7/4/2010	6:08:59 PM	Helium MFC set to  0.000000
7/4/2010	6:08:59 PM	H2 MFC set to  500.000000
7/4/2010	6:08:59 PM	BCl3 MFC set to  12.000000
7/4/2010	6:08:59 PM	PHl3 MFC set to  0.000000
7/4/2010	6:08:59 PM	SiCl4 MFC set to  50.000000
7/4/2010	6:08:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	6:08:59 PM	Tube furnace set to 1000
7/4/2010	6:28:59 PM	H2 valve closed
7/4/2010	6:28:59 PM	BCl3 valve closed
7/4/2010	6:28:59 PM	PH3 valve closed
7/4/2010	6:28:59 PM	SiCl4 pre valve closed
7/4/2010	6:28:59 PM	SiCl4 post valve closed
7/4/2010	6:28:59 PM	Main Vac valve closed
7/4/2010	6:28:59 PM	Bypass valve closed
7/4/2010	6:28:59 PM	Helium valve opened
7/4/2010	6:28:59 PM	Bubbler valve opened
7/4/2010	6:28:59 PM	Helium MFC set to  500.000000
7/4/2010	6:28:59 PM	H2 MFC set to  0.000000
7/4/2010	6:28:59 PM	BCl3 MFC set to  0.000000
7/4/2010	6:28:59 PM	PHl3 MFC set to  0.000000
7/4/2010	6:28:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	6:28:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	6:28:59 PM	Tube furnace set to 0
7/4/2010	6:48:59 PM	Helium valve closed
7/4/2010	6:48:59 PM	H2 valve closed
7/4/2010	6:48:59 PM	BCl3 valve closed
7/4/2010	6:48:59 PM	PH3 valve closed
7/4/2010	6:48:59 PM	SiCl4 pre valve closed
7/4/2010	6:48:59 PM	SiCl4 post valve closed
7/4/2010	6:48:59 PM	Main Vac valve closed
7/4/2010	6:48:59 PM	Bypass valve closed
7/4/2010	6:48:59 PM	Bubbler valve closed
7/4/2010	6:48:59 PM	Helium MFC set to  0.000000
7/4/2010	6:48:59 PM	H2 MFC set to  0.000000
7/4/2010	6:48:59 PM	BCl3 MFC set to  0.000000
7/4/2010	6:48:59 PM	PHl3 MFC set to  0.000000
7/4/2010	6:48:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	6:48:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	6:48:59 PM	Tube furnace set to 0
7/4/2010	6:48:59 PM	Run finished at 6:48 PM
7/4/2010	7:08:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	7:08:54 PM	Recipe started at 7:08 PM
7/4/2010	7:08:54 PM	H2 valve closed
7/4/2010	7:08:54 PM	BCl3 valve closed
7/4/2010	7:08:54 PM	PH3 valve closed
7/4/2010	7:08:54 PM	SiCl4 pre valve closed
7/4/2010	7:08:54 PM	SiCl4 post valve closed
7/4/2010	7:08:54 PM	Main Vac valve closed
7/4/2010	7:08:54 PM	Bypass valve closed
7/4/2010	7:08:54 PM	Bubbler valve closed
7/4/2010	7:08:54 PM	Helium valve opened
7/4/2010	7:08:54 PM	Helium MFC set to  500.000000
7/4/2010	7:08:54 PM	H2 MFC set to  0.000000
7/4/2010	7:08:55 PM	BCl3 MFC set to  0.000000
7/4/2010	7:08:55 PM	PHl3 MFC set to  0.000000
7/4/2010	7:08:55 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:08:55 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:08:55 PM	Tube furnace set to 0
7/4/2010	7:08:56 PM	Helium valve closed
7/4/2010	7:08:56 PM	H2 valve closed
7/4/2010	7:08:56 PM	BCl3 valve closed
7/4/2010	7:08:56 PM	PH3 valve closed
7/4/2010	7:08:56 PM	SiCl4 pre valve closed
7/4/2010	7:08:56 PM	SiCl4 post valve closed
7/4/2010	7:08:56 PM	Main Vac valve closed
7/4/2010	7:08:56 PM	Bypass valve closed
7/4/2010	7:08:56 PM	Bubbler valve closed
7/4/2010	7:08:56 PM	Helium MFC set to  0.000000
7/4/2010	7:08:56 PM	H2 MFC set to  0.000000
7/4/2010	7:08:56 PM	BCl3 MFC set to  0.000000
7/4/2010	7:08:56 PM	PHl3 MFC set to  0.000000
7/4/2010	7:08:56 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:08:56 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:08:57 PM	Tube furnace set to 0
7/4/2010	7:09:12 PM	Helium valve closed
7/4/2010	7:09:12 PM	H2 valve closed
7/4/2010	7:09:12 PM	BCl3 valve closed
7/4/2010	7:09:12 PM	PH3 valve closed
7/4/2010	7:09:12 PM	SiCl4 pre valve closed
7/4/2010	7:09:12 PM	SiCl4 post valve closed
7/4/2010	7:09:12 PM	Main Vac valve closed
7/4/2010	7:09:12 PM	Bubbler valve closed
7/4/2010	7:09:12 PM	Bypass valve opened
7/4/2010	7:09:12 PM	Helium MFC set to  0.000000
7/4/2010	7:09:12 PM	H2 MFC set to  0.000000
7/4/2010	7:09:12 PM	BCl3 MFC set to  0.000000
7/4/2010	7:09:12 PM	PHl3 MFC set to  0.000000
7/4/2010	7:09:12 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:09:12 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:09:12 PM	Tube furnace set to 0
7/4/2010	7:10:00 PM	Helium valve closed
7/4/2010	7:10:00 PM	H2 valve closed
7/4/2010	7:10:00 PM	BCl3 valve closed
7/4/2010	7:10:00 PM	PH3 valve closed
7/4/2010	7:10:00 PM	SiCl4 pre valve closed
7/4/2010	7:10:00 PM	SiCl4 post valve closed
7/4/2010	7:10:00 PM	Bubbler valve closed
7/4/2010	7:10:00 PM	Main Vac valve opened
7/4/2010	7:10:00 PM	Bypass valve opened
7/4/2010	7:10:00 PM	Helium MFC set to  0.000000
7/4/2010	7:10:00 PM	H2 MFC set to  0.000000
7/4/2010	7:10:00 PM	BCl3 MFC set to  0.000000
7/4/2010	7:10:00 PM	PHl3 MFC set to  0.000000
7/4/2010	7:10:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:10:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:10:00 PM	Tube furnace set to 0
7/4/2010	7:15:00 PM	H2 valve closed
7/4/2010	7:15:00 PM	BCl3 valve closed
7/4/2010	7:15:00 PM	PH3 valve closed
7/4/2010	7:15:00 PM	SiCl4 pre valve closed
7/4/2010	7:15:00 PM	SiCl4 post valve closed
7/4/2010	7:15:00 PM	Main Vac valve closed
7/4/2010	7:15:00 PM	Bypass valve closed
7/4/2010	7:15:00 PM	Bubbler valve closed
7/4/2010	7:15:00 PM	Helium valve opened
7/4/2010	7:15:00 PM	Helium MFC set to  500.000000
7/4/2010	7:15:00 PM	H2 MFC set to  0.000000
7/4/2010	7:15:00 PM	BCl3 MFC set to  0.000000
7/4/2010	7:15:00 PM	PHl3 MFC set to  0.000000
7/4/2010	7:15:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:15:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:15:00 PM	Tube furnace set to 0
7/4/2010	7:16:20 PM	Helium valve closed
7/4/2010	7:16:20 PM	H2 valve closed
7/4/2010	7:16:20 PM	BCl3 valve closed
7/4/2010	7:16:20 PM	PH3 valve closed
7/4/2010	7:16:20 PM	SiCl4 pre valve closed
7/4/2010	7:16:20 PM	SiCl4 post valve closed
7/4/2010	7:16:20 PM	Main Vac valve closed
7/4/2010	7:16:20 PM	Bypass valve closed
7/4/2010	7:16:20 PM	Bubbler valve closed
7/4/2010	7:16:20 PM	Helium MFC set to  0.000000
7/4/2010	7:16:20 PM	H2 MFC set to  0.000000
7/4/2010	7:16:20 PM	BCl3 MFC set to  0.000000
7/4/2010	7:16:20 PM	PHl3 MFC set to  0.000000
7/4/2010	7:16:20 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:16:20 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:16:20 PM	Tube furnace set to 0
7/4/2010	7:16:35 PM	Helium valve closed
7/4/2010	7:16:35 PM	H2 valve closed
7/4/2010	7:16:35 PM	BCl3 valve closed
7/4/2010	7:16:35 PM	PH3 valve closed
7/4/2010	7:16:35 PM	SiCl4 pre valve closed
7/4/2010	7:16:35 PM	SiCl4 post valve closed
7/4/2010	7:16:35 PM	Main Vac valve closed
7/4/2010	7:16:35 PM	Bubbler valve closed
7/4/2010	7:16:35 PM	Bypass valve opened
7/4/2010	7:16:35 PM	Helium MFC set to  0.000000
7/4/2010	7:16:35 PM	H2 MFC set to  0.000000
7/4/2010	7:16:35 PM	BCl3 MFC set to  0.000000
7/4/2010	7:16:35 PM	PHl3 MFC set to  0.000000
7/4/2010	7:16:35 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:16:35 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:16:35 PM	Tube furnace set to 0
7/4/2010	7:17:09 PM	Helium valve closed
7/4/2010	7:17:09 PM	H2 valve closed
7/4/2010	7:17:09 PM	BCl3 valve closed
7/4/2010	7:17:09 PM	PH3 valve closed
7/4/2010	7:17:09 PM	SiCl4 pre valve closed
7/4/2010	7:17:09 PM	SiCl4 post valve closed
7/4/2010	7:17:09 PM	Bubbler valve closed
7/4/2010	7:17:09 PM	Main Vac valve opened
7/4/2010	7:17:09 PM	Bypass valve opened
7/4/2010	7:17:09 PM	Helium MFC set to  0.000000
7/4/2010	7:17:09 PM	H2 MFC set to  0.000000
7/4/2010	7:17:09 PM	BCl3 MFC set to  0.000000
7/4/2010	7:17:09 PM	PHl3 MFC set to  0.000000
7/4/2010	7:17:09 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:17:09 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:17:09 PM	Tube furnace set to 0
7/4/2010	7:22:09 PM	H2 valve closed
7/4/2010	7:22:09 PM	BCl3 valve closed
7/4/2010	7:22:09 PM	PH3 valve closed
7/4/2010	7:22:09 PM	SiCl4 pre valve closed
7/4/2010	7:22:09 PM	SiCl4 post valve closed
7/4/2010	7:22:09 PM	Main Vac valve closed
7/4/2010	7:22:09 PM	Bypass valve closed
7/4/2010	7:22:09 PM	Bubbler valve closed
7/4/2010	7:22:09 PM	Helium valve opened
7/4/2010	7:22:09 PM	Helium MFC set to  500.000000
7/4/2010	7:22:09 PM	H2 MFC set to  0.000000
7/4/2010	7:22:09 PM	BCl3 MFC set to  0.000000
7/4/2010	7:22:09 PM	PHl3 MFC set to  0.000000
7/4/2010	7:22:09 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:22:09 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:22:09 PM	Tube furnace set to 0
7/4/2010	7:23:29 PM	Helium valve closed
7/4/2010	7:23:29 PM	H2 valve closed
7/4/2010	7:23:29 PM	BCl3 valve closed
7/4/2010	7:23:29 PM	PH3 valve closed
7/4/2010	7:23:29 PM	SiCl4 pre valve closed
7/4/2010	7:23:29 PM	SiCl4 post valve closed
7/4/2010	7:23:29 PM	Main Vac valve closed
7/4/2010	7:23:29 PM	Bypass valve closed
7/4/2010	7:23:29 PM	Bubbler valve closed
7/4/2010	7:23:29 PM	Helium MFC set to  0.000000
7/4/2010	7:23:29 PM	H2 MFC set to  0.000000
7/4/2010	7:23:29 PM	BCl3 MFC set to  0.000000
7/4/2010	7:23:29 PM	PHl3 MFC set to  0.000000
7/4/2010	7:23:29 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:23:29 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:23:29 PM	Tube furnace set to 0
7/4/2010	7:23:44 PM	Helium valve closed
7/4/2010	7:23:44 PM	H2 valve closed
7/4/2010	7:23:44 PM	BCl3 valve closed
7/4/2010	7:23:44 PM	PH3 valve closed
7/4/2010	7:23:44 PM	SiCl4 pre valve closed
7/4/2010	7:23:44 PM	SiCl4 post valve closed
7/4/2010	7:23:44 PM	Main Vac valve closed
7/4/2010	7:23:44 PM	Bubbler valve closed
7/4/2010	7:23:44 PM	Bypass valve opened
7/4/2010	7:23:44 PM	Helium MFC set to  0.000000
7/4/2010	7:23:44 PM	H2 MFC set to  0.000000
7/4/2010	7:23:44 PM	BCl3 MFC set to  0.000000
7/4/2010	7:23:44 PM	PHl3 MFC set to  0.000000
7/4/2010	7:23:44 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:23:44 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:23:44 PM	Tube furnace set to 0
7/4/2010	7:24:18 PM	Helium valve closed
7/4/2010	7:24:18 PM	H2 valve closed
7/4/2010	7:24:18 PM	BCl3 valve closed
7/4/2010	7:24:18 PM	PH3 valve closed
7/4/2010	7:24:18 PM	SiCl4 pre valve closed
7/4/2010	7:24:18 PM	SiCl4 post valve closed
7/4/2010	7:24:18 PM	Bubbler valve closed
7/4/2010	7:24:18 PM	Main Vac valve opened
7/4/2010	7:24:18 PM	Bypass valve opened
7/4/2010	7:24:18 PM	Helium MFC set to  0.000000
7/4/2010	7:24:18 PM	H2 MFC set to  0.000000
7/4/2010	7:24:18 PM	BCl3 MFC set to  0.000000
7/4/2010	7:24:18 PM	PHl3 MFC set to  0.000000
7/4/2010	7:24:18 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:24:18 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:24:18 PM	Tube furnace set to 0
7/4/2010	7:29:18 PM	Helium valve closed
7/4/2010	7:29:18 PM	H2 valve closed
7/4/2010	7:29:18 PM	BCl3 valve closed
7/4/2010	7:29:18 PM	PH3 valve closed
7/4/2010	7:29:18 PM	SiCl4 pre valve closed
7/4/2010	7:29:18 PM	SiCl4 post valve closed
7/4/2010	7:29:18 PM	Bubbler valve closed
7/4/2010	7:29:18 PM	Main Vac valve opened
7/4/2010	7:29:18 PM	Bypass valve opened
7/4/2010	7:29:18 PM	Helium MFC set to  0.000000
7/4/2010	7:29:18 PM	H2 MFC set to  0.000000
7/4/2010	7:29:18 PM	BCl3 MFC set to  0.000000
7/4/2010	7:29:18 PM	PHl3 MFC set to  0.000000
7/4/2010	7:29:18 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:29:18 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:29:18 PM	Tube furnace set to 0
7/4/2010	7:29:19 PM	Run finished at 7:29 PM
7/4/2010	7:29:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	7:29:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	7:29:58 PM	Recipe started at 7:29 PM
7/4/2010	7:29:58 PM	Helium valve closed
7/4/2010	7:29:58 PM	H2 valve closed
7/4/2010	7:29:58 PM	BCl3 valve closed
7/4/2010	7:29:58 PM	PH3 valve closed
7/4/2010	7:29:58 PM	SiCl4 pre valve closed
7/4/2010	7:29:58 PM	SiCl4 post valve closed
7/4/2010	7:29:58 PM	Main Vac valve closed
7/4/2010	7:29:58 PM	Bubbler valve closed
7/4/2010	7:29:58 PM	Bypass valve opened
7/4/2010	7:29:58 PM	Helium MFC set to  0.000000
7/4/2010	7:29:58 PM	H2 MFC set to  0.000000
7/4/2010	7:29:58 PM	BCl3 MFC set to  0.000000
7/4/2010	7:29:58 PM	PHl3 MFC set to  0.000000
7/4/2010	7:29:58 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:29:58 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:29:58 PM	Tube furnace set to 0
7/4/2010	7:29:59 PM	Helium valve closed
7/4/2010	7:29:59 PM	H2 valve closed
7/4/2010	7:29:59 PM	BCl3 valve closed
7/4/2010	7:29:59 PM	PH3 valve closed
7/4/2010	7:29:59 PM	SiCl4 pre valve closed
7/4/2010	7:29:59 PM	SiCl4 post valve closed
7/4/2010	7:29:59 PM	Bubbler valve closed
7/4/2010	7:29:59 PM	Main Vac valve opened
7/4/2010	7:29:59 PM	Bypass valve opened
7/4/2010	7:29:59 PM	Helium MFC set to  0.000000
7/4/2010	7:29:59 PM	H2 MFC set to  0.000000
7/4/2010	7:29:59 PM	BCl3 MFC set to  0.000000
7/4/2010	7:29:59 PM	PHl3 MFC set to  0.000000
7/4/2010	7:29:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:29:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:29:59 PM	Tube furnace set to 0
7/4/2010	7:30:59 PM	H2 valve closed
7/4/2010	7:30:59 PM	BCl3 valve closed
7/4/2010	7:30:59 PM	PH3 valve closed
7/4/2010	7:30:59 PM	SiCl4 pre valve closed
7/4/2010	7:30:59 PM	SiCl4 post valve closed
7/4/2010	7:30:59 PM	Bubbler valve closed
7/4/2010	7:30:59 PM	Helium valve opened
7/4/2010	7:30:59 PM	Main Vac valve opened
7/4/2010	7:30:59 PM	Bypass valve opened
7/4/2010	7:30:59 PM	Helium MFC set to  100.000000
7/4/2010	7:30:59 PM	H2 MFC set to  0.000000
7/4/2010	7:30:59 PM	BCl3 MFC set to  0.000000
7/4/2010	7:30:59 PM	PHl3 MFC set to  0.000000
7/4/2010	7:30:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:30:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:30:59 PM	Tube furnace set to 0
7/4/2010	7:39:59 PM	Helium valve closed
7/4/2010	7:39:59 PM	H2 valve closed
7/4/2010	7:39:59 PM	BCl3 valve closed
7/4/2010	7:39:59 PM	PH3 valve closed
7/4/2010	7:39:59 PM	SiCl4 pre valve closed
7/4/2010	7:39:59 PM	SiCl4 post valve closed
7/4/2010	7:39:59 PM	Bubbler valve closed
7/4/2010	7:39:59 PM	Main Vac valve opened
7/4/2010	7:39:59 PM	Bypass valve opened
7/4/2010	7:39:59 PM	Helium MFC set to  0.000000
7/4/2010	7:39:59 PM	H2 MFC set to  0.000000
7/4/2010	7:39:59 PM	BCl3 MFC set to  0.000000
7/4/2010	7:39:59 PM	PHl3 MFC set to  0.000000
7/4/2010	7:39:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:39:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:39:59 PM	Tube furnace set to 0
7/4/2010	7:40:59 PM	H2 valve closed
7/4/2010	7:40:59 PM	BCl3 valve closed
7/4/2010	7:40:59 PM	PH3 valve closed
7/4/2010	7:40:59 PM	SiCl4 pre valve closed
7/4/2010	7:40:59 PM	SiCl4 post valve closed
7/4/2010	7:40:59 PM	Bubbler valve closed
7/4/2010	7:40:59 PM	Helium valve opened
7/4/2010	7:40:59 PM	Main Vac valve opened
7/4/2010	7:40:59 PM	Bypass valve opened
7/4/2010	7:40:59 PM	Helium MFC set to  100.000000
7/4/2010	7:40:59 PM	H2 MFC set to  0.000000
7/4/2010	7:40:59 PM	BCl3 MFC set to  0.000000
7/4/2010	7:40:59 PM	PHl3 MFC set to  0.000000
7/4/2010	7:40:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:40:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:40:59 PM	Tube furnace set to 0
7/4/2010	7:49:59 PM	Helium valve closed
7/4/2010	7:49:59 PM	H2 valve closed
7/4/2010	7:49:59 PM	BCl3 valve closed
7/4/2010	7:49:59 PM	PH3 valve closed
7/4/2010	7:49:59 PM	SiCl4 pre valve closed
7/4/2010	7:49:59 PM	SiCl4 post valve closed
7/4/2010	7:49:59 PM	Bubbler valve closed
7/4/2010	7:49:59 PM	Main Vac valve opened
7/4/2010	7:49:59 PM	Bypass valve opened
7/4/2010	7:49:59 PM	Helium MFC set to  0.000000
7/4/2010	7:49:59 PM	H2 MFC set to  0.000000
7/4/2010	7:49:59 PM	BCl3 MFC set to  0.000000
7/4/2010	7:49:59 PM	PHl3 MFC set to  0.000000
7/4/2010	7:49:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:49:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:49:59 PM	Tube furnace set to 0
7/4/2010	7:50:59 PM	H2 valve closed
7/4/2010	7:50:59 PM	BCl3 valve closed
7/4/2010	7:50:59 PM	PH3 valve closed
7/4/2010	7:50:59 PM	SiCl4 pre valve closed
7/4/2010	7:50:59 PM	SiCl4 post valve closed
7/4/2010	7:51:00 PM	Bubbler valve closed
7/4/2010	7:51:00 PM	Helium valve opened
7/4/2010	7:51:00 PM	Main Vac valve opened
7/4/2010	7:51:00 PM	Bypass valve opened
7/4/2010	7:51:00 PM	Helium MFC set to  100.000000
7/4/2010	7:51:00 PM	H2 MFC set to  0.000000
7/4/2010	7:51:00 PM	BCl3 MFC set to  0.000000
7/4/2010	7:51:00 PM	PHl3 MFC set to  0.000000
7/4/2010	7:51:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	7:51:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	7:51:00 PM	Tube furnace set to 0
7/4/2010	8:00:00 PM	Helium valve closed
7/4/2010	8:00:00 PM	H2 valve closed
7/4/2010	8:00:00 PM	BCl3 valve closed
7/4/2010	8:00:00 PM	PH3 valve closed
7/4/2010	8:00:00 PM	SiCl4 pre valve closed
7/4/2010	8:00:00 PM	SiCl4 post valve closed
7/4/2010	8:00:00 PM	Bubbler valve closed
7/4/2010	8:00:00 PM	Main Vac valve opened
7/4/2010	8:00:00 PM	Bypass valve opened
7/4/2010	8:00:00 PM	Helium MFC set to  0.000000
7/4/2010	8:00:00 PM	H2 MFC set to  0.000000
7/4/2010	8:00:00 PM	BCl3 MFC set to  0.000000
7/4/2010	8:00:00 PM	PHl3 MFC set to  0.000000
7/4/2010	8:00:00 PM	SiCl4 MFC set to  0.000000
7/4/2010	8:00:00 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	8:00:00 PM	Tube furnace set to 0
7/4/2010	8:00:01 PM	Run finished at 8:00 PM
7/4/2010	8:00:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	9:01:54 PM	Recipe started at 9:01 PM
7/4/2010	9:01:54 PM	Helium valve closed
7/4/2010	9:01:54 PM	BCl3 valve closed
7/4/2010	9:01:54 PM	PH3 valve closed
7/4/2010	9:01:54 PM	SiCl4 pre valve closed
7/4/2010	9:01:54 PM	SiCl4 post valve closed
7/4/2010	9:01:54 PM	Main Vac valve closed
7/4/2010	9:01:54 PM	Bypass valve closed
7/4/2010	9:01:54 PM	Bubbler valve closed
7/4/2010	9:01:54 PM	H2 valve opened
7/4/2010	9:01:54 PM	Helium MFC set to  0.000000
7/4/2010	9:01:54 PM	H2 MFC set to  500.000000
7/4/2010	9:01:54 PM	BCl3 MFC set to  0.000000
7/4/2010	9:01:54 PM	PHl3 MFC set to  0.000000
7/4/2010	9:01:54 PM	SiCl4 MFC set to  0.000000
7/4/2010	9:01:54 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	9:01:54 PM	Tube furnace set to 0
7/4/2010	9:03:14 PM	Helium valve closed
7/4/2010	9:03:14 PM	BCl3 valve closed
7/4/2010	9:03:14 PM	PH3 valve closed
7/4/2010	9:03:14 PM	SiCl4 pre valve closed
7/4/2010	9:03:14 PM	SiCl4 post valve closed
7/4/2010	9:03:14 PM	Main Vac valve closed
7/4/2010	9:03:14 PM	Bypass valve closed
7/4/2010	9:03:14 PM	H2 valve opened
7/4/2010	9:03:14 PM	Bubbler valve opened
7/4/2010	9:03:14 PM	Helium MFC set to  0.000000
7/4/2010	9:03:14 PM	H2 MFC set to  500.000000
7/4/2010	9:03:15 PM	BCl3 MFC set to  0.000000
7/4/2010	9:03:15 PM	PHl3 MFC set to  0.000000
7/4/2010	9:03:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	9:03:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	9:03:15 PM	Tube furnace set to 1000
7/4/2010	9:23:15 PM	Helium valve closed
7/4/2010	9:23:15 PM	PH3 valve closed
7/4/2010	9:23:15 PM	Main Vac valve closed
7/4/2010	9:23:15 PM	Bypass valve closed
7/4/2010	9:23:15 PM	H2 valve opened
7/4/2010	9:23:15 PM	BCl3 valve opened
7/4/2010	9:23:15 PM	SiCl4 pre valve opened
7/4/2010	9:23:15 PM	SiCl4 post valve opened
7/4/2010	9:23:15 PM	Bubbler valve opened
7/4/2010	9:23:15 PM	Helium MFC set to  0.000000
7/4/2010	9:23:15 PM	H2 MFC set to  500.000000
7/4/2010	9:23:15 PM	BCl3 MFC set to  35.000000
7/4/2010	9:23:15 PM	PHl3 MFC set to  0.000000
7/4/2010	9:23:15 PM	SiCl4 MFC set to  50.000000
7/4/2010	9:23:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	9:23:15 PM	Tube furnace set to 1000
7/4/2010	9:43:15 PM	H2 valve closed
7/4/2010	9:43:15 PM	BCl3 valve closed
7/4/2010	9:43:15 PM	PH3 valve closed
7/4/2010	9:43:15 PM	SiCl4 pre valve closed
7/4/2010	9:43:15 PM	SiCl4 post valve closed
7/4/2010	9:43:15 PM	Main Vac valve closed
7/4/2010	9:43:15 PM	Bypass valve closed
7/4/2010	9:43:15 PM	Helium valve opened
7/4/2010	9:43:15 PM	Bubbler valve opened
7/4/2010	9:43:15 PM	Helium MFC set to  500.000000
7/4/2010	9:43:15 PM	H2 MFC set to  0.000000
7/4/2010	9:43:15 PM	BCl3 MFC set to  0.000000
7/4/2010	9:43:15 PM	PHl3 MFC set to  0.000000
7/4/2010	9:43:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	9:43:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	9:43:15 PM	Tube furnace set to 0
7/4/2010	10:03:15 PM	Helium valve closed
7/4/2010	10:03:15 PM	H2 valve closed
7/4/2010	10:03:15 PM	BCl3 valve closed
7/4/2010	10:03:15 PM	PH3 valve closed
7/4/2010	10:03:15 PM	SiCl4 pre valve closed
7/4/2010	10:03:15 PM	SiCl4 post valve closed
7/4/2010	10:03:15 PM	Main Vac valve closed
7/4/2010	10:03:15 PM	Bypass valve closed
7/4/2010	10:03:15 PM	Bubbler valve closed
7/4/2010	10:03:15 PM	Helium MFC set to  0.000000
7/4/2010	10:03:15 PM	H2 MFC set to  0.000000
7/4/2010	10:03:15 PM	BCl3 MFC set to  0.000000
7/4/2010	10:03:15 PM	PHl3 MFC set to  0.000000
7/4/2010	10:03:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:03:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:03:15 PM	Tube furnace set to 0
7/4/2010	10:03:15 PM	Run finished at 10:03 PM
7/4/2010	10:16:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	10:16:59 PM	Recipe started at 10:16 PM
7/4/2010	10:16:59 PM	H2 valve closed
7/4/2010	10:16:59 PM	BCl3 valve closed
7/4/2010	10:16:59 PM	PH3 valve closed
7/4/2010	10:16:59 PM	SiCl4 pre valve closed
7/4/2010	10:16:59 PM	SiCl4 post valve closed
7/4/2010	10:16:59 PM	Main Vac valve closed
7/4/2010	10:16:59 PM	Bypass valve closed
7/4/2010	10:16:59 PM	Bubbler valve closed
7/4/2010	10:16:59 PM	Helium valve opened
7/4/2010	10:16:59 PM	Helium MFC set to  500.000000
7/4/2010	10:16:59 PM	H2 MFC set to  0.000000
7/4/2010	10:16:59 PM	BCl3 MFC set to  0.000000
7/4/2010	10:16:59 PM	PHl3 MFC set to  0.000000
7/4/2010	10:16:59 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:16:59 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:16:59 PM	Tube furnace set to 0
7/4/2010	10:17:01 PM	Helium valve closed
7/4/2010	10:17:01 PM	H2 valve closed
7/4/2010	10:17:01 PM	BCl3 valve closed
7/4/2010	10:17:01 PM	PH3 valve closed
7/4/2010	10:17:01 PM	SiCl4 pre valve closed
7/4/2010	10:17:01 PM	SiCl4 post valve closed
7/4/2010	10:17:02 PM	Main Vac valve closed
7/4/2010	10:17:02 PM	Bypass valve closed
7/4/2010	10:17:02 PM	Bubbler valve closed
7/4/2010	10:17:02 PM	Helium MFC set to  0.000000
7/4/2010	10:17:02 PM	H2 MFC set to  0.000000
7/4/2010	10:17:02 PM	BCl3 MFC set to  0.000000
7/4/2010	10:17:02 PM	PHl3 MFC set to  0.000000
7/4/2010	10:17:02 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:17:02 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:17:02 PM	Tube furnace set to 0
7/4/2010	10:17:17 PM	Helium valve closed
7/4/2010	10:17:17 PM	H2 valve closed
7/4/2010	10:17:17 PM	BCl3 valve closed
7/4/2010	10:17:17 PM	PH3 valve closed
7/4/2010	10:17:17 PM	SiCl4 pre valve closed
7/4/2010	10:17:17 PM	SiCl4 post valve closed
7/4/2010	10:17:17 PM	Main Vac valve closed
7/4/2010	10:17:17 PM	Bubbler valve closed
7/4/2010	10:17:17 PM	Bypass valve opened
7/4/2010	10:17:17 PM	Helium MFC set to  0.000000
7/4/2010	10:17:17 PM	H2 MFC set to  0.000000
7/4/2010	10:17:17 PM	BCl3 MFC set to  0.000000
7/4/2010	10:17:17 PM	PHl3 MFC set to  0.000000
7/4/2010	10:17:17 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:17:17 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:17:17 PM	Tube furnace set to 0
7/4/2010	10:18:04 PM	Helium valve closed
7/4/2010	10:18:04 PM	H2 valve closed
7/4/2010	10:18:04 PM	BCl3 valve closed
7/4/2010	10:18:04 PM	PH3 valve closed
7/4/2010	10:18:04 PM	SiCl4 pre valve closed
7/4/2010	10:18:04 PM	SiCl4 post valve closed
7/4/2010	10:18:04 PM	Bubbler valve closed
7/4/2010	10:18:04 PM	Main Vac valve opened
7/4/2010	10:18:04 PM	Bypass valve opened
7/4/2010	10:18:04 PM	Helium MFC set to  0.000000
7/4/2010	10:18:04 PM	H2 MFC set to  0.000000
7/4/2010	10:18:04 PM	BCl3 MFC set to  0.000000
7/4/2010	10:18:04 PM	PHl3 MFC set to  0.000000
7/4/2010	10:18:04 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:18:04 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:18:05 PM	Tube furnace set to 0
7/4/2010	10:23:05 PM	H2 valve closed
7/4/2010	10:23:05 PM	BCl3 valve closed
7/4/2010	10:23:05 PM	PH3 valve closed
7/4/2010	10:23:05 PM	SiCl4 pre valve closed
7/4/2010	10:23:05 PM	SiCl4 post valve closed
7/4/2010	10:23:05 PM	Main Vac valve closed
7/4/2010	10:23:05 PM	Bypass valve closed
7/4/2010	10:23:05 PM	Bubbler valve closed
7/4/2010	10:23:05 PM	Helium valve opened
7/4/2010	10:23:05 PM	Helium MFC set to  500.000000
7/4/2010	10:23:05 PM	H2 MFC set to  0.000000
7/4/2010	10:23:05 PM	BCl3 MFC set to  0.000000
7/4/2010	10:23:05 PM	PHl3 MFC set to  0.000000
7/4/2010	10:23:05 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:23:05 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:23:05 PM	Tube furnace set to 0
7/4/2010	10:24:24 PM	Helium valve closed
7/4/2010	10:24:24 PM	H2 valve closed
7/4/2010	10:24:24 PM	BCl3 valve closed
7/4/2010	10:24:24 PM	PH3 valve closed
7/4/2010	10:24:24 PM	SiCl4 pre valve closed
7/4/2010	10:24:24 PM	SiCl4 post valve closed
7/4/2010	10:24:24 PM	Main Vac valve closed
7/4/2010	10:24:24 PM	Bypass valve closed
7/4/2010	10:24:24 PM	Bubbler valve closed
7/4/2010	10:24:24 PM	Helium MFC set to  0.000000
7/4/2010	10:24:25 PM	H2 MFC set to  0.000000
7/4/2010	10:24:25 PM	BCl3 MFC set to  0.000000
7/4/2010	10:24:25 PM	PHl3 MFC set to  0.000000
7/4/2010	10:24:25 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:24:25 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:24:25 PM	Tube furnace set to 0
7/4/2010	10:24:40 PM	Helium valve closed
7/4/2010	10:24:40 PM	H2 valve closed
7/4/2010	10:24:40 PM	BCl3 valve closed
7/4/2010	10:24:40 PM	PH3 valve closed
7/4/2010	10:24:40 PM	SiCl4 pre valve closed
7/4/2010	10:24:40 PM	SiCl4 post valve closed
7/4/2010	10:24:40 PM	Main Vac valve closed
7/4/2010	10:24:40 PM	Bubbler valve closed
7/4/2010	10:24:40 PM	Bypass valve opened
7/4/2010	10:24:40 PM	Helium MFC set to  0.000000
7/4/2010	10:24:40 PM	H2 MFC set to  0.000000
7/4/2010	10:24:40 PM	BCl3 MFC set to  0.000000
7/4/2010	10:24:40 PM	PHl3 MFC set to  0.000000
7/4/2010	10:24:40 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:24:40 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:24:40 PM	Tube furnace set to 0
7/4/2010	10:25:13 PM	Helium valve closed
7/4/2010	10:25:13 PM	H2 valve closed
7/4/2010	10:25:13 PM	BCl3 valve closed
7/4/2010	10:25:13 PM	PH3 valve closed
7/4/2010	10:25:13 PM	SiCl4 pre valve closed
7/4/2010	10:25:13 PM	SiCl4 post valve closed
7/4/2010	10:25:13 PM	Bubbler valve closed
7/4/2010	10:25:13 PM	Main Vac valve opened
7/4/2010	10:25:13 PM	Bypass valve opened
7/4/2010	10:25:13 PM	Helium MFC set to  0.000000
7/4/2010	10:25:13 PM	H2 MFC set to  0.000000
7/4/2010	10:25:13 PM	BCl3 MFC set to  0.000000
7/4/2010	10:25:13 PM	PHl3 MFC set to  0.000000
7/4/2010	10:25:13 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:25:13 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:25:14 PM	Tube furnace set to 0
7/4/2010	10:26:06 PM	Run aborted at 10:26 PM
7/4/2010	10:26:06 PM	Helium valve closed
7/4/2010	10:26:06 PM	H2 valve closed
7/4/2010	10:26:06 PM	BCl3 valve closed
7/4/2010	10:26:06 PM	PH3 valve closed
7/4/2010	10:26:06 PM	SiCl4 pre valve closed
7/4/2010	10:26:06 PM	SiCl4 post valve closed
7/4/2010	10:26:06 PM	Bypass valve closed
7/4/2010	10:26:06 PM	Main Vac valve closed
7/4/2010	10:26:06 PM	Bubbler valve closed
7/4/2010	10:26:06 PM	Helium MFC set to  0.000000
7/4/2010	10:26:06 PM	H2 MFC set to  0.000000
7/4/2010	10:26:06 PM	BCl3 MFC set to  0.000000
7/4/2010	10:26:06 PM	PHl3 MFC set to  0.000000
7/4/2010	10:26:06 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:26:06 PM	Tube furnace set to 0
7/4/2010	10:26:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/4/2010	10:26:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	10:26:14 PM	Recipe started at 10:26 PM
7/4/2010	10:26:14 PM	Helium valve closed
7/4/2010	10:26:14 PM	H2 valve closed
7/4/2010	10:26:14 PM	BCl3 valve closed
7/4/2010	10:26:14 PM	PH3 valve closed
7/4/2010	10:26:14 PM	SiCl4 pre valve closed
7/4/2010	10:26:14 PM	SiCl4 post valve closed
7/4/2010	10:26:14 PM	Main Vac valve closed
7/4/2010	10:26:14 PM	Bubbler valve closed
7/4/2010	10:26:14 PM	Bypass valve opened
7/4/2010	10:26:14 PM	Helium MFC set to  0.000000
7/4/2010	10:26:14 PM	H2 MFC set to  0.000000
7/4/2010	10:26:14 PM	BCl3 MFC set to  0.000000
7/4/2010	10:26:14 PM	PHl3 MFC set to  0.000000
7/4/2010	10:26:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:26:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:26:14 PM	Tube furnace set to 0
7/4/2010	10:26:14 PM	Helium valve closed
7/4/2010	10:26:14 PM	H2 valve closed
7/4/2010	10:26:14 PM	BCl3 valve closed
7/4/2010	10:26:14 PM	PH3 valve closed
7/4/2010	10:26:14 PM	SiCl4 pre valve closed
7/4/2010	10:26:14 PM	SiCl4 post valve closed
7/4/2010	10:26:14 PM	Bubbler valve closed
7/4/2010	10:26:14 PM	Main Vac valve opened
7/4/2010	10:26:14 PM	Bypass valve opened
7/4/2010	10:26:14 PM	Helium MFC set to  0.000000
7/4/2010	10:26:14 PM	H2 MFC set to  0.000000
7/4/2010	10:26:14 PM	BCl3 MFC set to  0.000000
7/4/2010	10:26:14 PM	PHl3 MFC set to  0.000000
7/4/2010	10:26:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:26:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:26:14 PM	Tube furnace set to 0
7/4/2010	10:27:14 PM	H2 valve closed
7/4/2010	10:27:14 PM	BCl3 valve closed
7/4/2010	10:27:14 PM	PH3 valve closed
7/4/2010	10:27:14 PM	SiCl4 pre valve closed
7/4/2010	10:27:14 PM	SiCl4 post valve closed
7/4/2010	10:27:14 PM	Bubbler valve closed
7/4/2010	10:27:14 PM	Helium valve opened
7/4/2010	10:27:14 PM	Main Vac valve opened
7/4/2010	10:27:14 PM	Bypass valve opened
7/4/2010	10:27:14 PM	Helium MFC set to  100.000000
7/4/2010	10:27:14 PM	H2 MFC set to  0.000000
7/4/2010	10:27:14 PM	BCl3 MFC set to  0.000000
7/4/2010	10:27:14 PM	PHl3 MFC set to  0.000000
7/4/2010	10:27:14 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:27:14 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:27:15 PM	Tube furnace set to 0
7/4/2010	10:36:15 PM	Helium valve closed
7/4/2010	10:36:15 PM	H2 valve closed
7/4/2010	10:36:15 PM	BCl3 valve closed
7/4/2010	10:36:15 PM	PH3 valve closed
7/4/2010	10:36:15 PM	SiCl4 pre valve closed
7/4/2010	10:36:15 PM	SiCl4 post valve closed
7/4/2010	10:36:15 PM	Bubbler valve closed
7/4/2010	10:36:15 PM	Main Vac valve opened
7/4/2010	10:36:15 PM	Bypass valve opened
7/4/2010	10:36:15 PM	Helium MFC set to  0.000000
7/4/2010	10:36:15 PM	H2 MFC set to  0.000000
7/4/2010	10:36:15 PM	BCl3 MFC set to  0.000000
7/4/2010	10:36:15 PM	PHl3 MFC set to  0.000000
7/4/2010	10:36:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:36:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:36:15 PM	Tube furnace set to 0
7/4/2010	10:37:15 PM	H2 valve closed
7/4/2010	10:37:15 PM	BCl3 valve closed
7/4/2010	10:37:15 PM	PH3 valve closed
7/4/2010	10:37:15 PM	SiCl4 pre valve closed
7/4/2010	10:37:15 PM	SiCl4 post valve closed
7/4/2010	10:37:15 PM	Bubbler valve closed
7/4/2010	10:37:15 PM	Helium valve opened
7/4/2010	10:37:15 PM	Main Vac valve opened
7/4/2010	10:37:15 PM	Bypass valve opened
7/4/2010	10:37:15 PM	Helium MFC set to  100.000000
7/4/2010	10:37:15 PM	H2 MFC set to  0.000000
7/4/2010	10:37:15 PM	BCl3 MFC set to  0.000000
7/4/2010	10:37:15 PM	PHl3 MFC set to  0.000000
7/4/2010	10:37:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:37:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:37:15 PM	Tube furnace set to 0
7/4/2010	10:46:15 PM	Helium valve closed
7/4/2010	10:46:15 PM	H2 valve closed
7/4/2010	10:46:15 PM	BCl3 valve closed
7/4/2010	10:46:15 PM	PH3 valve closed
7/4/2010	10:46:15 PM	SiCl4 pre valve closed
7/4/2010	10:46:15 PM	SiCl4 post valve closed
7/4/2010	10:46:15 PM	Bubbler valve closed
7/4/2010	10:46:15 PM	Main Vac valve opened
7/4/2010	10:46:15 PM	Bypass valve opened
7/4/2010	10:46:15 PM	Helium MFC set to  0.000000
7/4/2010	10:46:15 PM	H2 MFC set to  0.000000
7/4/2010	10:46:15 PM	BCl3 MFC set to  0.000000
7/4/2010	10:46:15 PM	PHl3 MFC set to  0.000000
7/4/2010	10:46:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:46:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:46:15 PM	Tube furnace set to 0
7/4/2010	10:47:15 PM	H2 valve closed
7/4/2010	10:47:15 PM	BCl3 valve closed
7/4/2010	10:47:15 PM	PH3 valve closed
7/4/2010	10:47:15 PM	SiCl4 pre valve closed
7/4/2010	10:47:15 PM	SiCl4 post valve closed
7/4/2010	10:47:15 PM	Bubbler valve closed
7/4/2010	10:47:15 PM	Helium valve opened
7/4/2010	10:47:15 PM	Main Vac valve opened
7/4/2010	10:47:15 PM	Bypass valve opened
7/4/2010	10:47:15 PM	Helium MFC set to  100.000000
7/4/2010	10:47:15 PM	H2 MFC set to  0.000000
7/4/2010	10:47:15 PM	BCl3 MFC set to  0.000000
7/4/2010	10:47:15 PM	PHl3 MFC set to  0.000000
7/4/2010	10:47:15 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:47:15 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:47:15 PM	Tube furnace set to 0
7/4/2010	10:54:11 PM	Helium valve closed
7/4/2010	10:54:11 PM	H2 valve closed
7/4/2010	10:54:11 PM	BCl3 valve closed
7/4/2010	10:54:11 PM	PH3 valve closed
7/4/2010	10:54:11 PM	SiCl4 pre valve closed
7/4/2010	10:54:11 PM	SiCl4 post valve closed
7/4/2010	10:54:11 PM	Bubbler valve closed
7/4/2010	10:54:11 PM	Main Vac valve opened
7/4/2010	10:54:12 PM	Bypass valve opened
7/4/2010	10:54:12 PM	Helium MFC set to  0.000000
7/4/2010	10:54:12 PM	H2 MFC set to  0.000000
7/4/2010	10:54:12 PM	BCl3 MFC set to  0.000000
7/4/2010	10:54:12 PM	PHl3 MFC set to  0.000000
7/4/2010	10:54:12 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:54:12 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:54:12 PM	Tube furnace set to 0
7/4/2010	10:54:13 PM	Run finished at 10:54 PM
7/4/2010	10:54:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	10:54:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	10:54:20 PM	Recipe started at 10:54 PM
7/4/2010	10:54:20 PM	Helium valve closed
7/4/2010	10:54:20 PM	H2 valve closed
7/4/2010	10:54:20 PM	BCl3 valve closed
7/4/2010	10:54:20 PM	PH3 valve closed
7/4/2010	10:54:20 PM	SiCl4 pre valve closed
7/4/2010	10:54:20 PM	SiCl4 post valve closed
7/4/2010	10:54:20 PM	Main Vac valve closed
7/4/2010	10:54:20 PM	Bubbler valve closed
7/4/2010	10:54:20 PM	Bypass valve opened
7/4/2010	10:54:20 PM	Helium MFC set to  0.000000
7/4/2010	10:54:20 PM	H2 MFC set to  0.000000
7/4/2010	10:54:20 PM	BCl3 MFC set to  0.000000
7/4/2010	10:54:20 PM	PHl3 MFC set to  0.000000
7/4/2010	10:54:20 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:54:20 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:54:20 PM	Tube furnace set to 0
7/4/2010	10:54:21 PM	Helium valve closed
7/4/2010	10:54:21 PM	H2 valve closed
7/4/2010	10:54:21 PM	BCl3 valve closed
7/4/2010	10:54:21 PM	PH3 valve closed
7/4/2010	10:54:21 PM	SiCl4 pre valve closed
7/4/2010	10:54:21 PM	SiCl4 post valve closed
7/4/2010	10:54:21 PM	Bubbler valve closed
7/4/2010	10:54:21 PM	Main Vac valve opened
7/4/2010	10:54:21 PM	Bypass valve opened
7/4/2010	10:54:21 PM	Helium MFC set to  0.000000
7/4/2010	10:54:21 PM	H2 MFC set to  0.000000
7/4/2010	10:54:21 PM	BCl3 MFC set to  0.000000
7/4/2010	10:54:21 PM	PHl3 MFC set to  0.000000
7/4/2010	10:54:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:54:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:54:21 PM	Tube furnace set to 0
7/4/2010	10:55:21 PM	H2 valve closed
7/4/2010	10:55:21 PM	BCl3 valve closed
7/4/2010	10:55:21 PM	PH3 valve closed
7/4/2010	10:55:21 PM	SiCl4 pre valve closed
7/4/2010	10:55:21 PM	SiCl4 post valve closed
7/4/2010	10:55:21 PM	Bubbler valve closed
7/4/2010	10:55:21 PM	Helium valve opened
7/4/2010	10:55:21 PM	Main Vac valve opened
7/4/2010	10:55:21 PM	Bypass valve opened
7/4/2010	10:55:21 PM	Helium MFC set to  100.000000
7/4/2010	10:55:21 PM	H2 MFC set to  0.000000
7/4/2010	10:55:21 PM	BCl3 MFC set to  0.000000
7/4/2010	10:55:21 PM	PHl3 MFC set to  0.000000
7/4/2010	10:55:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	10:55:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	10:55:21 PM	Tube furnace set to 0
7/4/2010	11:04:21 PM	Helium valve closed
7/4/2010	11:04:21 PM	H2 valve closed
7/4/2010	11:04:21 PM	BCl3 valve closed
7/4/2010	11:04:21 PM	PH3 valve closed
7/4/2010	11:04:21 PM	SiCl4 pre valve closed
7/4/2010	11:04:21 PM	SiCl4 post valve closed
7/4/2010	11:04:21 PM	Bubbler valve closed
7/4/2010	11:04:21 PM	Main Vac valve opened
7/4/2010	11:04:21 PM	Bypass valve opened
7/4/2010	11:04:21 PM	Helium MFC set to  0.000000
7/4/2010	11:04:21 PM	H2 MFC set to  0.000000
7/4/2010	11:04:21 PM	BCl3 MFC set to  0.000000
7/4/2010	11:04:21 PM	PHl3 MFC set to  0.000000
7/4/2010	11:04:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:04:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:04:21 PM	Tube furnace set to 0
7/4/2010	11:05:21 PM	H2 valve closed
7/4/2010	11:05:21 PM	BCl3 valve closed
7/4/2010	11:05:21 PM	PH3 valve closed
7/4/2010	11:05:21 PM	SiCl4 pre valve closed
7/4/2010	11:05:21 PM	SiCl4 post valve closed
7/4/2010	11:05:21 PM	Bubbler valve closed
7/4/2010	11:05:21 PM	Helium valve opened
7/4/2010	11:05:21 PM	Main Vac valve opened
7/4/2010	11:05:21 PM	Bypass valve opened
7/4/2010	11:05:21 PM	Helium MFC set to  100.000000
7/4/2010	11:05:21 PM	H2 MFC set to  0.000000
7/4/2010	11:05:21 PM	BCl3 MFC set to  0.000000
7/4/2010	11:05:21 PM	PHl3 MFC set to  0.000000
7/4/2010	11:05:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:05:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:05:21 PM	Tube furnace set to 0
7/4/2010	11:14:21 PM	Helium valve closed
7/4/2010	11:14:21 PM	H2 valve closed
7/4/2010	11:14:21 PM	BCl3 valve closed
7/4/2010	11:14:21 PM	PH3 valve closed
7/4/2010	11:14:21 PM	SiCl4 pre valve closed
7/4/2010	11:14:21 PM	SiCl4 post valve closed
7/4/2010	11:14:21 PM	Bubbler valve closed
7/4/2010	11:14:21 PM	Main Vac valve opened
7/4/2010	11:14:21 PM	Bypass valve opened
7/4/2010	11:14:21 PM	Helium MFC set to  0.000000
7/4/2010	11:14:21 PM	H2 MFC set to  0.000000
7/4/2010	11:14:21 PM	BCl3 MFC set to  0.000000
7/4/2010	11:14:21 PM	PHl3 MFC set to  0.000000
7/4/2010	11:14:21 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:14:21 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:14:22 PM	Tube furnace set to 0
7/4/2010	11:15:22 PM	H2 valve closed
7/4/2010	11:15:22 PM	BCl3 valve closed
7/4/2010	11:15:22 PM	PH3 valve closed
7/4/2010	11:15:22 PM	SiCl4 pre valve closed
7/4/2010	11:15:22 PM	SiCl4 post valve closed
7/4/2010	11:15:22 PM	Bubbler valve closed
7/4/2010	11:15:22 PM	Helium valve opened
7/4/2010	11:15:22 PM	Main Vac valve opened
7/4/2010	11:15:22 PM	Bypass valve opened
7/4/2010	11:15:22 PM	Helium MFC set to  100.000000
7/4/2010	11:15:22 PM	H2 MFC set to  0.000000
7/4/2010	11:15:22 PM	BCl3 MFC set to  0.000000
7/4/2010	11:15:22 PM	PHl3 MFC set to  0.000000
7/4/2010	11:15:22 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:15:22 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:15:22 PM	Tube furnace set to 0
7/4/2010	11:24:22 PM	Helium valve closed
7/4/2010	11:24:22 PM	H2 valve closed
7/4/2010	11:24:22 PM	BCl3 valve closed
7/4/2010	11:24:22 PM	PH3 valve closed
7/4/2010	11:24:22 PM	SiCl4 pre valve closed
7/4/2010	11:24:22 PM	SiCl4 post valve closed
7/4/2010	11:24:22 PM	Bubbler valve closed
7/4/2010	11:24:22 PM	Main Vac valve opened
7/4/2010	11:24:22 PM	Bypass valve opened
7/4/2010	11:24:22 PM	Helium MFC set to  0.000000
7/4/2010	11:24:22 PM	H2 MFC set to  0.000000
7/4/2010	11:24:22 PM	BCl3 MFC set to  0.000000
7/4/2010	11:24:22 PM	PHl3 MFC set to  0.000000
7/4/2010	11:24:22 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:24:22 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:24:22 PM	Tube furnace set to 0
7/4/2010	11:24:23 PM	Run finished at 11:24 PM
7/4/2010	11:24:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/4/2010	11:48:16 PM	Recipe started at 11:48 PM
7/4/2010	11:48:16 PM	Helium valve closed
7/4/2010	11:48:16 PM	BCl3 valve closed
7/4/2010	11:48:16 PM	PH3 valve closed
7/4/2010	11:48:16 PM	SiCl4 pre valve closed
7/4/2010	11:48:16 PM	SiCl4 post valve closed
7/4/2010	11:48:16 PM	Main Vac valve closed
7/4/2010	11:48:16 PM	Bypass valve closed
7/4/2010	11:48:16 PM	Bubbler valve closed
7/4/2010	11:48:16 PM	H2 valve opened
7/4/2010	11:48:16 PM	Helium MFC set to  0.000000
7/4/2010	11:48:16 PM	H2 MFC set to  500.000000
7/4/2010	11:48:16 PM	BCl3 MFC set to  0.000000
7/4/2010	11:48:16 PM	PHl3 MFC set to  0.000000
7/4/2010	11:48:16 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:48:16 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:48:16 PM	Tube furnace set to 0
7/4/2010	11:49:37 PM	Helium valve closed
7/4/2010	11:49:37 PM	BCl3 valve closed
7/4/2010	11:49:37 PM	PH3 valve closed
7/4/2010	11:49:37 PM	SiCl4 pre valve closed
7/4/2010	11:49:37 PM	SiCl4 post valve closed
7/4/2010	11:49:37 PM	Main Vac valve closed
7/4/2010	11:49:37 PM	Bypass valve closed
7/4/2010	11:49:37 PM	H2 valve opened
7/4/2010	11:49:37 PM	Bubbler valve opened
7/4/2010	11:49:37 PM	Helium MFC set to  0.000000
7/4/2010	11:49:37 PM	H2 MFC set to  500.000000
7/4/2010	11:49:37 PM	BCl3 MFC set to  0.000000
7/4/2010	11:49:37 PM	PHl3 MFC set to  0.000000
7/4/2010	11:49:37 PM	SiCl4 MFC set to  0.000000
7/4/2010	11:49:37 PM	Bypass solenoid MFC set to  0.000000
7/4/2010	11:49:38 PM	Tube furnace set to 1000
